Application of bulk silicon carbide technology in high temperature MEMS sensors
Y Zhai, H Li, H Wu, Z Tao, G Xu, X Cao, T Xu - Materials Science in …, 2024 - Elsevier
SiC is widely used in power electronics and high-temperature devices due to its
comprehensive physicochemical properties, including high thermal stability, mechanical …
comprehensive physicochemical properties, including high thermal stability, mechanical …
Nonlinear piezoresistive effect of 4H–SiC for applications of high temperature pressure sensors
M Meng, R Fu, T Xue, M Shen, Y Hu, Y Liu… - Journal of Materials …, 2024 - Springer
Abstract 4H–SiC is an ideal material for micro-electromechanical system sensors used in
high temperature environment due to its outstanding material properties. In this work, we …
high temperature environment due to its outstanding material properties. In this work, we …