Extreme ultraviolet lithography and three dimensional integrated circuit—A review

B Wu, A Kumar - Applied Physics Reviews, 2014 - pubs.aip.org
The term 3D IC generally means an IC package having multiple device layers, which is
different with 3D transistor structures such as the FinFET. 3D packaging and 3D integration …

A review of recent research on heat transfer in three-dimensional integrated circuits (3-D ICs)

SS Salvi, A Jain - IEEE Transactions on Components …, 2021 - ieeexplore.ieee.org
Three-dimensional integrated circuits (3-D IC) technology has emerged in the past few
decades, driven in part by the techno-economic difficulties of dimensional scaling and the …

Review and projections of integrated cooling systems for three-dimensional integrated circuits

SG Kandlikar - Journal of Electronic Packaging, 2014 - asmedigitalcollection.asme.org
In an effort to increase processor speeds, 3D IC architecture is being aggressively pursued
by researchers and chip manufacturers. This architecture allows extremely high level of …

Thermal management of 3D chip with non-uniform hotspots by integrated gradient distribution annular-cavity micro-pin fins

S Feng, Y Yan, H Li, L Zhang, S Yang - Applied Thermal Engineering, 2021 - Elsevier
Targeted at addressing practical thermal issues of 3D-IC chip, heat transfer characteristics
and temperature uniformity of gradient distribution solid and annular-cavity micro-pin fins are …

Embedded single phase microfluidic thermal management for non-uniform heating and hotspots using microgaps with variable pin fin clustering

D Lorenzini, C Green, TE Sarvey, X Zhang, Y Hu… - International Journal of …, 2016 - Elsevier
The presence of variable heat fluxes, such as localized hotspots in integrated circuit (IC)
architectures poses a key challenge for thermal management of existing (2D) and emerging …

Thermal TSV optimization and hierarchical floorplanning for 3-D integrated circuits

Z Ren, A Alqahtani, N Bagherzadeh… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
While 3-D integrated circuits (ICs) offer many advantages over 2-D ICs, thermal
management challenges remain unresolved. Thermal through-silicon-vias (TTSVs) are …

Heat transfer characteristics investigations on liquid-cooled integrated micro pin-fin chip with gradient distribution arrays and double heating input for intra-chip micro …

S Feng, Y Yan, H Li, F Xu, L Zhang - International Journal of Heat and Mass …, 2020 - Elsevier
Targeting at improving temperature uniformity for intra-chip cooling, present work
experimentally and numerically investigates the influence of flow rate, heat flux density, fluid …

Reprint of: Temperature Uniformity Enhancement and Flow Characteristics of Embedded Gradient Distribution Micro Pin Fin Arrays Using Dielectric Coolant for Direct …

S Feng, Y Yan, H Li, Z He, L Zhang - International Journal of Heat and Mass …, 2020 - Elsevier
Targeting at reducing temperature gradient in the direct intra-chip cooling, embedded
gradient distribution micro pin fin arrays are fabricated. The flow characteristics and …

3D integrated circuit cooling with microfluidics

S Wang, Y Yin, C Hu, P Rezai - Micromachines, 2018 - mdpi.com
Using microfluidic cooling to achieve thermal management of three-dimensional integrated
circuits (ICs) is recognized as a promising method of extending Moore law progression in …

Numerical modeling and experimental validation of two-phase microfluidic cooling in silicon devices for vertical integration of microelectronics

D Lorenzini, Y Joshi - International Journal of Heat and Mass Transfer, 2019 - Elsevier
The vertical integration of microelectronics is an appealing approach that offers significant
performance advantages over conventional planar devices. However, one of the main …