Material science and device physics in SiC technology for high-voltage power devices

T Kimoto - Japanese Journal of Applied Physics, 2015 - iopscience.iop.org
Power semiconductor devices are key components in power conversion systems. Silicon
carbide (SiC) has received increasing attention as a wide-bandgap semiconductor suitable …

Silicon carbide and diamond for high temperature device applications

M Willander, M Friesel, Q Wahab… - Journal of Materials …, 2006 - Springer
The physical and chemical properties of wide bandgap semiconductors silicon carbide and
diamond make these materials an ideal choice for device fabrication for applications in …

Characterization of Transient Gate Oxide Trapping in SiC MOSFETs Using Fast Techniques

M Gurfinkel, HD Xiong, KP Cheung… - … on Electron Devices, 2008 - ieeexplore.ieee.org
Threshold voltage and drain current instabilities in state-of-the-art 4H-SiC MOSFETs with
thermal as-grown SiO 2 and NO-annealed gate oxides have been studied using fast IV …

Identification of a major cause of endemically poor mobilities in SiC/SiO2 structures

X Shen, ST Pantelides - Applied Physics Letters, 2011 - pubs.aip.org
Poor electron mobility at SiC/SiO 2 interfaces has long held up the development of SiC-
based power devices. The mobility degradation has been attributed to defects at the …

Time-Dependent Dielectric Breakdown of 4H-SiC/ MOS Capacitors

M Gurfinkel, JC Horst, JS Suehle… - IEEE transactions on …, 2008 - ieeexplore.ieee.org
Time-dependent dielectric breakdown (TDDB) is one of the major issues concerning long-
range reliability of dielectric layers in SiC-based high-power devices. Despite the extensive …

High field-effect mobility in n-channel Si face 4H-SiC MOSFETs with gate oxide grown on aluminum ion-implanted material

G Gudjonsson, HO Olafsson, F Allerstam… - IEEE electron device …, 2005 - ieeexplore.ieee.org
We report investigations of Si face 4H-SiC MOSFETs with aluminum (Al) ion-implanted gate
channels. High-quality SiO/sub 2/-SiC interfaces are obtained both when the gate oxide is …

On the Evaluation of Gate Dielectrics for 4H‐SiC Based Power MOSFETs

M Nawaz - Active and Passive Electronic Components, 2015 - Wiley Online Library
This work deals with the assessment of gate dielectric for 4H‐SiC MOSFETs using
technology based two‐dimensional numerical computer simulations. Results are studied for …

Reduction of interface state density in SiC (0001) MOS structures by low-oxygen-partial-pressure annealing

T Kobayashi, K Tachiki, K Ito, T Kimoto - Applied Physics Express, 2019 - iopscience.iop.org
We report that annealing in low-oxygen-partial-pressure (low-p O2) ambient is effective in
reducing the interface state density (D IT) at a SiC (0001)/SiO 2 interface near the …

High channel mobility 4H-SiC metal-oxide-semiconductor field-effect transistor with low temperature metal-organic chemical-vapor deposition grown Al2O3 gate …

S Hino, T Hatayama, J Kato, E Tokumitsu… - Applied Physics …, 2008 - pubs.aip.org
Ultrahigh channel mobility is demonstrated for 4 H-Si C metal-oxide-semiconductor field-
effect transistors (MOSFETs) with Al 2 O 3 gate insulators fabricated at low temperatures by …

Accurate evaluation of fast threshold voltage shift for SiC MOS devices under various gate bias stress conditions

M Sometani, M Okamoto, T Hatakeyama… - Japanese Journal of …, 2018 - iopscience.iop.org
We investigated methods of measuring the threshold voltage (V th) shift of 4H-silicon carbide
(SiC) metal–oxide–semiconductor field-effect transistors (MOSFETs) under positive DC …