A review of the recent applications of aluminum nitride-based piezoelectric devices
Piezoelectric materials have attracted considerable attention over the last two decades
because many technologies utilize their core properties of piezoelectric materials. Previous …
because many technologies utilize their core properties of piezoelectric materials. Previous …
Capacitive micromachined ultrasound transducers for intravascular ultrasound imaging
J Wang, Z Zheng, J Chan, JTW Yeow - Microsystems & …, 2020 - nature.com
Intravascular ultrasound (IVUS) is a burgeoning imaging technology that provides vital
information for the diagnosis of coronary arterial diseases. A significant constituent that …
information for the diagnosis of coronary arterial diseases. A significant constituent that …
Small blind-area, high-accuracy ultrasonic rangefinder using a broadband multi-frequency piezoelectric micromachined ultrasonic transducer array
G Luo, K He, Y Wang, W Zhou, K Chen… - Measurement …, 2023 - iopscience.iop.org
This paper presents a broadband ultrasonic rangefinder, with merits of a small blind area
and high accuracy, based on a multi-frequency piezoelectric micromachined ultrasonic …
and high accuracy, based on a multi-frequency piezoelectric micromachined ultrasonic …
Tent-plate AlN PMUT with a piston-like shape under liquid operation
In this work, a waterproof tent-plate piezoelectric micromachined ultrasonic transducer
(PMUT) with enhanced performance as actuator and sensor in comparison with standard …
(PMUT) with enhanced performance as actuator and sensor in comparison with standard …
Resonant Inertial Mass Sensing for VOCs—CMOS-Compatible SoC Integration Advantages and Challenges: A Review
Volatile organic compounds (VOCs) have gained the biomedical community's attention
given their relevance in exhaled human breath analysis for noninvasive disease diagnosis …
given their relevance in exhaled human breath analysis for noninvasive disease diagnosis …
AlN piezoelectric micromachined ultrasonic transducer array monolithically fabricated on top of pre-processed CMOS substrates
E Ledesma, I Zamora, F Torres… - … Conference on Solid …, 2019 - ieeexplore.ieee.org
This paper presents a 6× 6 AlN piezoelectric micromachined ultrasonic transducers (PMUT)
array with competitive performance as an actuator and as sensor compared with other …
array with competitive performance as an actuator and as sensor compared with other …
Squared PMUT with enhanced pressure sensitivities
This study presents a squared AlN piezoelectric micromachined ultrasonic transducer
(PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity …
(PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity …
AlN PMUT with crossed-cavity for better acoustic pressure outputs in liquid at high frequency
E Ledesma, V Tzanov, I Zamora… - … Conference on Solid …, 2019 - ieeexplore.ieee.org
A novel AlN PMUT compatible with CMOS-MEMS process is presented. The design is a
squared membrane with 4 different sections. The operational frequency of the device in …
squared membrane with 4 different sections. The operational frequency of the device in …
Fully integrated CMOS-PMUT transceiver
In this paper we present a full-transceiver (transmitter and receiver) intended to excite and
amplify the signal coming from an ultrasonic transducer. The transducer is basically a …
amplify the signal coming from an ultrasonic transducer. The transducer is basically a …
Energy Detector Based on MEMS-CMOS Co-Design for Wake-Up Receivers
J Liu, M Qiu, F Lin, Q Huang, S Liu… - 2024 IEEE Ultrasonics …, 2024 - ieeexplore.ieee.org
This paper presents a novel resonant energy detector (RED) based on MEMS-CMOS co-
design for wake-up receivers (WuRX) so as to improve the anti-interference capability …
design for wake-up receivers (WuRX) so as to improve the anti-interference capability …