Transversely excited film bulk acoustic resonator using rotated YX cut lithium niobate

V Yantchev, V Plesski, B Garcia - US Patent 10,790,802, 2020 - Google Patents
Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator
includes a substrate and a lithium niobate (LN) plate having front and back surfaces. The …

Transversely-excited film bulk acoustic resonators for high power applications

B Garcia, R Hammond, P Turner, N Fenzi… - US Patent …, 2020 - Google Patents
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having parallel front and …

Solidly-mounted transversely-excited film bulk acoustic resonator

V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2020 - Google Patents
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having parallel front and …

Transversely-excited film bulk acoustic resonator

V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2019 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate and a piezoelectric plate having parallel front and back surfaces, the back surface …

Transversely-excited film bulk acoustic resonator

V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2020 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having parallel front and …

Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate

V Plesski - US Patent 10,797,675, 2020 - Google Patents
Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator
includes a substrate and a lithium niobate (LN) plate having parallel front and back surfaces …

Transversely-excited film bulk acoustic resonators with molybdenum conductors

V Plesski, B Garcia, J Koskela, P Turner - US Patent 10,826,462, 2020 - Google Patents
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having front and back …

Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness

V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2021 - Google Patents
Filter devices and methods of fabrication are disclosed. A filter device includes a
piezoelectric plate attached to a substrate, portions of the piezoelectric plate forming dia …

XBAR resonators with non-rectangular diaphragms

V Yantchev, P Turner, V Plesski, J Koskela… - US Patent …, 2021 - Google Patents
Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An
acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric …

High power transversely-excited film bulk acoustic resonators on Z-cut lithium niobate

B Garcia, R Hammond, P Turner, N Fenzi… - US Patent …, 2020 - Google Patents
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a
substrate having a surface and a Z-cut lithium niobate piezoelectric plate having parallel …