Over the past two decades, technologies for microsystems fabrication have made
considerable progress. This has made possible a large variety of new commercial devices …

An innovative technology for the realization of key elements of a microfabricated reduction
unit is presented. In view of integrating the functions of gear, pinion and axle into one …

This contribution focuses on the objectives of microsystems technology (MST). The reason
for this is two fold. First of all, it should explain what MST actually is. This question is often …

The recent innovations in dry etching make it a promising technology for the fabrications of
micromoulds. The high aspect ratios, directional freedom, low roughness, high etch rates …

In this paper a surface micromachining process is presented which has been used to
fabricate electrostatic microactuators that are interconnected with each other and linked to …

Many applications for microengineered devices can be envisaged for actuators capable of
doing work or transferring power. Millimetre order turbines are considered in this study for …

A surface micromachining process is presented which has been used to fabricate
electrostatic microactuators. These microactuators are interconnected with each other and …

This paper describes the design and process of fully-integrated multilayer MEMS chips,
including mm-sized wobble motor and actuator, with potential application in high density …

This paper presents design issues and a theoretical model of electrostatically driven axial-
gap polysilicon wobble motors. The motor design benefits from large axial rotor-to-stator …

This paper describes a rationalized approach to the design of micro-mechanisms which
focuses on three important design factors: device configuration, materials and fabrication …