This paper presents a brief history of scanning probe microscopes (SPMs) and a general
insight into an atomic force microscope (AFM), including its operating principles, modes …

The invention of the nanotechnology adds a new branch to investigate and control the
physical properties of matters at atomic level. The aim of this technology is to image the …

We report on the application of internal model control for accurate tracking of a spiral
trajectory for atomic force microscopy (AFM). With a closed-loop bandwidth of only 300 Hz …

Using Lissajous scan trajectory is a promising way to get rid of issues resulting from the
raster scan trajectory in several advanced applications, like atomic force microscopy and fast …

Due to the lightly damped resonance and intrinsic nonlinearities, it is difficult for the
piezoactuated nanopositioning stage to realize high-bandwidth and high-accuracy control …

We demonstrate the application of internal model control for accurate tracking of spiral scan
trajectories, where the reference signals are orthogonal sinusoids whose amplitudes linearly …

We demonstrate the application of the internal model principle in tracking a sequential
cycloid trajectory to achieve video-rate atomic force microscope (AFM) imaging. To generate …

An optimal controller for high-precision spiral positioning of a piezoelectric tube scanner
used in an atomic force microscope (AFM) is proposed in this paper. In the proposed control …

The resonant controller (RC), as a promising candidate for high-speed nonraster
nanopositioning applications, can track the sinusoidal reference with zero steady-state error …

The achievable performance of the piezo-actuated nano-positioning stages is severely
limited by the intrinsic nonlinearities of the actuators, the lightly damped resonant mode of …