30 years of atomic force microscopy: creep, hysteresis, cross-coupling, and vibration problems of piezoelectric tube scanners
H Habibullah - Measurement, 2020 - Elsevier
This paper presents a brief history of scanning probe microscopes (SPMs) and a general
insight into an atomic force microscope (AFM), including its operating principles, modes …
insight into an atomic force microscope (AFM), including its operating principles, modes …
Improvement of alternative non-raster scanning methods for high speed atomic force microscopy: A review
The invention of the nanotechnology adds a new branch to investigate and control the
physical properties of matters at atomic level. The aim of this technology is to image the …
physical properties of matters at atomic level. The aim of this technology is to image the …
Combining spiral scanning and internal model control for sequential AFM imaging at video rate
We report on the application of internal model control for accurate tracking of a spiral
trajectory for atomic force microscopy (AFM). With a closed-loop bandwidth of only 300 Hz …
trajectory for atomic force microscopy (AFM). With a closed-loop bandwidth of only 300 Hz …
Dual-notch-based repetitive control for tracking Lissajous scan trajectories with piezo-actuated nanoscanners
Using Lissajous scan trajectory is a promising way to get rid of issues resulting from the
raster scan trajectory in several advanced applications, like atomic force microscopy and fast …
raster scan trajectory in several advanced applications, like atomic force microscopy and fast …
High-bandwidth tracking control of piezoactuated nanopositioning stages via active modal control
Due to the lightly damped resonance and intrinsic nonlinearities, it is difficult for the
piezoactuated nanopositioning stage to realize high-bandwidth and high-accuracy control …
piezoactuated nanopositioning stage to realize high-bandwidth and high-accuracy control …
Internal model control for spiral trajectory tracking with MEMS AFM scanners
We demonstrate the application of internal model control for accurate tracking of spiral scan
trajectories, where the reference signals are orthogonal sinusoids whose amplitudes linearly …
trajectories, where the reference signals are orthogonal sinusoids whose amplitudes linearly …
Video-rate non-raster AFM imaging with cycloid trajectory
We demonstrate the application of the internal model principle in tracking a sequential
cycloid trajectory to achieve video-rate atomic force microscope (AFM) imaging. To generate …
cycloid trajectory to achieve video-rate atomic force microscope (AFM) imaging. To generate …
A novel control approach for high-precision positioning of a piezoelectric tube scanner
H Habibullah, HR Pota… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
An optimal controller for high-precision spiral positioning of a piezoelectric tube scanner
used in an atomic force microscope (AFM) is proposed in this paper. In the proposed control …
used in an atomic force microscope (AFM) is proposed in this paper. In the proposed control …
Tracking control of nanopositioning stages using parallel resonant controllers for high-speed nonraster sequential scanning
The resonant controller (RC), as a promising candidate for high-speed nonraster
nanopositioning applications, can track the sinusoidal reference with zero steady-state error …
nanopositioning applications, can track the sinusoidal reference with zero steady-state error …
Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and H∞ control
The achievable performance of the piezo-actuated nano-positioning stages is severely
limited by the intrinsic nonlinearities of the actuators, the lightly damped resonant mode of …
limited by the intrinsic nonlinearities of the actuators, the lightly damped resonant mode of …