Resonant d33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes
This work reports a resonant piezoelectric mirror driven by rotated directional interdigitated
electrodes exploiting the d 33 mode. This work expands the prior work on directional IDEs …
electrodes exploiting the d 33 mode. This work expands the prior work on directional IDEs …
Actuation and Sensing for PZT Micromirrors Using Mode Directional Interdigitated Electrodes
This work explores the use of directional interdigitated electrodes leveraging d_33 mode
polarization for mode-selective actuation and sensing of micromirrors. To this end, a direct …
polarization for mode-selective actuation and sensing of micromirrors. To this end, a direct …
Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function
T Sasaki, A Piot, C Fleury, S Guerreiro… - 2024 IEEE 37th …, 2024 - ieeexplore.ieee.org
A piezoelectrically actuated two-dimensional micromirror with varifocal function is
demonstrated. The tilting functions and the varifocal function are operated using PZT thin …
demonstrated. The tilting functions and the varifocal function are operated using PZT thin …
Large Stroke Piezo Mems Mirror for High-Speed Fourier Transform Spectroscopy
This paper reports design, microfabrication and characterization of a new resonant piston
mode thin-film piezo based micromirror, optimized for high-speed Fourier transform …
mode thin-film piezo based micromirror, optimized for high-speed Fourier transform …