Hard drive suspension microactuator with restraining layer for control of bending

L Zhang, P Hahn, KC Ee - US Patent 9,117,468, 2015 - Google Patents
A PZT microactuator such as for a hard disk drive has a restraining layer bonded on its side
that is opposite the side on which the PZT is mounted. The restraining layer comprises a stiff …

Multi-layer PZT microactuator having a poled but inactive PZT constraining layer

KC Ee, L Zhang, P Hahn, D Glaess - US Patent 9,741,376, 2017 - Google Patents
A multi-layer piezoelectric microactuator assembly has at least one poled and active
piezoelectric layer and one poled but inactive piezoelectric layer. The poled but inactive …

Suspension microactuator with wrap-around electrode on inactive constraining layer

P Hahn, KC Ee, C Dunn - US Patent 9,070,394, 2015 - Google Patents
(57) ABSTRACT A PZT microactuator such as for a hard disk drive has a restraining layer on
its side that is opposite the side on which the PZT is mounted. The restraining layer is a stiff …

HDD microactuator having reverse poling and active restraining layer

P Hahn, KC Ee, L Zhang - US Patent 9,330,694, 2016 - Google Patents
A PZT microactuator such as for a hard disk drive is a multi-layer PZT in which a first layer of
PZT material that is disposed away from the side of the microactuator that is bonded to the …

DSA suspension having multi-layer PZT microactuator with active PZT constraining layers

P Hahn, KC Ee, L Zhang - US Patent 9,330,698, 2016 - Google Patents
(57) ABSTRACT A PZT microactuator such as for a hard disk drive has a restraining layer
bonded on its side that is opposite the side on which the PZT is mounted. The restraining …

Multi-layer PZT microactuator having a poled but inactive PZT constraining layer

KC Ee, L Zhang, P Hahn, D Glaess - US Patent 10,236,022, 2019 - Google Patents
ABSTRACT A multi-layer piezoelectric microactuator assembly has at least one poled and
active piezoelectric layer and one poled but inactive piezoelectric layer. The poled but …

Method of manufacturing a multi-layer PZT microactuator using wafer-level processing

C Dunn, P Hahn - US Patent 10,128,431, 2018 - Google Patents
A multi-level piezoelectric actuator is manufactured using wafer level processing. Two PZT
wafers are formed and separately metallized for electrodes. The metallization on the second …

Piezoelectric actuator with wrap-around electrode on inactive constraining layer

P Hahn, KC Ee, C Dunn - US Patent 9,330,699, 2016 - Google Patents
(63) Continuation of application No. 14/620,120, filed on Feb. 1, 2015, now Pat No.
9,070,394, which is a (7) ABSTRACT continuation-in-part of application No. 14/214.525, A …

Piezoelectric microactuator with restraining layer for control of bending

L Zhang, P Hahn, KC Ee - US Patent 9,390,739, 2016 - Google Patents
A PZT microactuator such as for use in a hard disk drive has a restraining layer bonded on
its side that is opposite the side on which the PZT will be mounted. The restraining layer …

Multi-layer PZT microactuator with active PZT constraining layer for a DSA suspension

P Hahn, KC Ee, L Zhang - US Patent 10,074,390, 2018 - Google Patents
A PZT microactuator such as for a hard disk drive has a restraining layer bonded on its side
that is opposite the side on which the PZT is mounted. The restraining layer comprises a stiff …