Recent advances in nanorobotic manipulation inside scanning electron microscopes

C Shi, DK Luu, Q Yang, J Liu, J Chen, C Ru… - Microsystems & …, 2016 - nature.com
A scanning electron microscope (SEM) provides real-time imaging with nanometer
resolution and a large scanning area, which enables the development and integration of …

A review of computer microvision-based precision motion measurement: Principles, characteristics, and applications

S Yao, H Li, S Pang, B Zhu, X Zhang… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
Microengineering/nanoengineering is an emerging field that enables engineering and
scientific discoveries in the microworld. As an effective and powerful tool for automation and …

An improved template-matching-based pose tracking method for planar nanopositioning stages using enhanced correlation coefficient

H Li, X Zhang, S Yao, B Zhu, S Fatikow - IEEE Sensors Journal, 2020 - ieeexplore.ieee.org
In the development and application of planar nanopositioning stages (PNSs), there is an
urgent need to measure pose quickly and accurately. An improved pose measurement …

Visual Tracking with Motion Distortion Removal for Nanomanipulation inside SEM

X Fu, Y Yang, Z Sun, H Su, Y Li, T Li… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
The article investigates the problem of visual tracking of moving objects in nanomanipulation
inside a scanning electron microscope (SEM). Image noise is a primary concern when …

Mechanical, electrostatic, and electromagnetic manipulation of microobjects and nanoobjects in electron microscopes

AI Denisyuk, AV Krasavin, FE Komissarenko… - Advances in Imaging …, 2014 - Elsevier
We review methods and instruments for micromanipulation in electron microscopes. This
kind of manipulation allows handling of individual micro-and nanoobjects with nanometer …

3D Reconstruction in Scanning Electron Microscope: from image acquisition to dense point cloud

A Kudryavtsev - 2017 - theses.hal.science
The goal of this work is to obtain a 3D model of an object from its multiple views acquired
withScanning Electron Microscope (SEM). For this, the technique of 3D reconstruction is …

Three-dimensional visual tracking and pose estimation in scanning electron microscopes

L Cui, E Marchand, S Haliyo… - 2016 IEEE/RSJ …, 2016 - ieeexplore.ieee.org
Visual tracking and estimation of the 3D posture of a micro/nano-object is a key issue in the
development of automated manipulation tasks using the visual feedback. The 3D posture of …

How to achieve precise operation of a robotic manipulator on a macro to micro/nano scale

Z Yu, Q Shi, H Wang, N Yu, Q Huang… - Assembly Automation, 2017 - emerald.com
Purpose The purpose of this paper is to present state-of-the-art approaches for precise
operation of a robotic manipulator on a macro-to micro/nanoscale. Design/methodology …

Full 3d rotation estimation in scanning electron microscope

AV Kudryavtsev, S Dembélé… - 2017 IEEE/RSJ …, 2017 - ieeexplore.ieee.org
Estimation of 3D object position is a crucial step for a variety of robotics and computer vision
applications including 3D reconstruction and object manipulation. When working in …

Robust tracking of motion-distorted objects using active models

C Dahmen - 2012 International Symposium on …, 2012 - ieeexplore.ieee.org
Scanning electron microscope image acquisition leads to distortion of object shape when
the object is moving sufficiently fast during acquisition. The algorithms used up to now are …