Atomic layer deposition of metal oxides and chalcogenides for high performance transistors

C Shen, Z Yin, F Collins, N Pinna - Advanced Science, 2022 - Wiley Online Library
Atomic layer deposition (ALD) is a deposition technique well‐suited to produce high‐quality
thin film materials at the nanoscale for applications in transistors. This review …

Overview of power electronic switches: A summary of the past, state-of-the-art and illumination of the future

IN Jiya, R Gouws - Micromachines, 2020 - mdpi.com
As the need for green and effective utilization of energy continues to grow, the
advancements in the energy and power electronics industry are constantly driven by this …

[图书][B] Heteroepitaxy of semiconductors: theory, growth, and characterization

JE Ayers, T Kujofsa, P Rago, J Raphael - 2016 - taylorfrancis.com
In the past ten years, heteroepitaxy has continued to increase in importance with the
explosive growth of the electronics industry and the development of a myriad of …

Impact of channel thickness on the large-signal performance in InAlGaN/AlN/GaN HEMTs with an AlGaN back barrier

A Malmros, P Gamarra, M Thorsell… - … on Electron Devices, 2018 - ieeexplore.ieee.org
The impact of varying the GaN channel layer thickness (t ch) in InAlGaN/AlN/GaN HEMTs
with C-doped AlGaN back barriers is investigated. t ch was 50, 100, and 150 nm, and the …

Improved Power Performance and the Mechanism of AlGaN/GaN HEMTs Using Si-Rich SiN/Si3N4 Bilayer Passivation

J Liu, M Mi, J Zhu, S Liu, P Wang… - … on Electron Devices, 2021 - ieeexplore.ieee.org
AlGaN/GaN high-electron-mobility transistors (HEMTs) with Si-rich SiN/Si 3 N 4 bilayer
passivation were studied in this article. The use of a Si-rich SiN interlayer leads to improved …

AlGaN/GaN MIS-HEMTs With High Quality ALD-Al2O3 Gate Dielectric Using Water and Remote Oxygen Plasma As Oxidants

HC Wang, TE Hsieh, YC Lin, QH Luc… - IEEE Journal of the …, 2017 - ieeexplore.ieee.org
We demonstrate the electrical performances of AlGaN/GaN metal-insulator-semiconductor-
high electron mobility transistors (MIS-HEMTs) with high quality Al 2 O 3 gate dielectric …

AlN/GaN/InGaN coupling-channel HEMTs with steep subthreshold swing of sub-60 mV/decade

H Lu, L Yang, B Hou, M Zhang, M Wu, XH Ma… - Applied Physics …, 2022 - pubs.aip.org
This work reports an AlN/GaN/InGaN high electron mobility transistor (HEMT) with a steep
subthreshold swing (SS) of sub-60 mV/dec utilizing a coupling-channel architecture. The …

Current collapse suppression in AlGaN/GaN HEMTs using dual-layer SiNx stressor passivation

C Deng, WC Cheng, XG Chen, KY Wen, MH He… - Applied Physics …, 2023 - pubs.aip.org
In this work, a dramatic reduction in current collapse is achieved in GaN-based high-electron-
mobility transistors (HEMTs) using dual-layer SiN x stressor passivation (DSSP), and the …

Low resistive Au-free, Ta-based, recessed ohmic contacts to InAlN/AlN/GaN heterostructures

J Bergsten, A Malmros, M Tordjman… - Semiconductor …, 2015 - iopscience.iop.org
The formation of recess etched Au-free ohmic contacts to an InAlN/AlN/GaN heterostructure
is investigated. A Ta/Al/Ta metal stack is used to produce contacts with contact resistance (R …

Total-ionizing-dose responses of GaN-based HEMTs with different channel thicknesses and MOSHEMTs with epitaxial MgCaO as gate dielectric

MA Bhuiyan, H Zhou, SJ Chang, X Lou… - … on Nuclear Science, 2017 - ieeexplore.ieee.org
The radiation hardness of AlGaN/GaN high-electron-mobility transistors (HEMTs) is found to
improve with increasing GaN channel thickness. Epitaxial MgCaO shows promise as a …