硅微谐振式加速度计具有体积小, 成本低, 动态范围宽, 高精度准数字频率信号输出等优势,
但零偏, 标度因数等关键性能指标受到了温度等因素的制约, 尚不能满足高精度导航制导的高 …

This article presents a single-chip accelerometer with the best reported thermal noise and
the lowest bias instability among state-of-the-art accelerometers with high-(1000) sensing …

The performance of a six-axis force/torque sensor (F/T sensor) severely decreased when
working in an extreme environment due to its sensitivity to ambient temperature. This paper …

This article presents a 16-bit wide-bandwidth (BW) high-performance (HP) three-axis micro-
electromechanical system (MEMS) accelerometer readout application-specific integrated …

This paper reports on the development of a monolithic capacitive accelerometer array
system that has a designed full-scale range of, a bandwidth larger than 10, with a minimum …

Real-time monitoring of slopes, tunnels, and dams is important for ensuring the long-term
stability and reliability of such structures. Despite the successes of current technologies in …

The research presents two structures designed to compare the strength of lateral sidewalls
against the strength of top and bottom surfaces in a monocrystalline silicon process for …

In the trend of Internet of Things (IoT), technologies that integrate CMOS (complementary
metal-oxide-semiconductor) electronics with MEMS (microelectromechanical systems) …