Kinetostatic and dynamic modeling of flexure-based compliant mechanisms: a survey
Flexure-based compliant mechanisms are becoming increasingly promising in precision
engineering, robotics, and other applications due to the excellent advantages of no friction …
engineering, robotics, and other applications due to the excellent advantages of no friction …
Advances in haptics, tactile sensing, and manipulation for robot‐assisted minimally invasive surgery, noninvasive surgery, and diagnosis
The developments of medical practices and medical technologies have always progressed
concurrently. The relatively recent developments in endoscopic technologies have allowed …
concurrently. The relatively recent developments in endoscopic technologies have allowed …
A novel actuator-internal micro/nano positioning stage with an arch-shape bridge-type amplifier
This paper presents a novel actuator-internal two degree-of-freedom (2-DOF) micro/nano
positioning stage actuated by piezoelectric (PZT) actuators, which can be used as a fine …
positioning stage actuated by piezoelectric (PZT) actuators, which can be used as a fine …
Investigation on the development and building of a voice coil actuator-driven XY micro-motion stage with dual-range capabilities
A growing trend in the utilization of compliant micro-motion stages, which offer exceptional
precision and repeatability in positioning. These stages enable the creation of dual-range …
precision and repeatability in positioning. These stages enable the creation of dual-range …
Development and active disturbance rejection control of a compliant micro-/nanopositioning piezostage with dual mode
In the atomic force microscope (AFM) scanning system, the piezoscanner is significant in
realizing high-performance tasks. To cater to this demand, a novel compliant two-degrees-of …
realizing high-performance tasks. To cater to this demand, a novel compliant two-degrees-of …
A spatial deployable three-DOF compliant nano-positioner with a three-stage motion amplification mechanism
This article presents the design, analysis, and prototype test of a novel spatial deployable
three-degree of freedom (DOF) compliant nano-positioner with a three-stage motion …
three-degree of freedom (DOF) compliant nano-positioner with a three-stage motion …
Development and repetitive-compensated PID control of a nanopositioning stage with large-stroke and decoupling property
Piezoelectric-actuator-driven nanopositioning stages, with large stroke and low crosstalk,
are quite appealing for fulfilling the through-silicon via lithography etching task. The …
are quite appealing for fulfilling the through-silicon via lithography etching task. The …
Development of a piezoelectrically actuated two-degree-of-freedom fast tool servo with decoupled motions for micro-/nanomachining
The limited degrees of freedom (DOFs) of servo motions is an inherent deficiency in
conventional, fast-tool-servo-(FTS)-assisted, diamond-turning, highly blocking applications …
conventional, fast-tool-servo-(FTS)-assisted, diamond-turning, highly blocking applications …
Design, analysis, and test of a novel 2-DOF nanopositioning system driven by dual mode
Piezodriven flexure-based motion stages, with a large workspace and high positioning
precision, are really attractive for the realization of high-performance atomic force …
precision, are really attractive for the realization of high-performance atomic force …
Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning
In this paper, a new piezo-actuated XY parallel compliant mechanism for large workspace
nano-positioning with decoupled motions is developed by incorporating a novel Z-shaped …
nano-positioning with decoupled motions is developed by incorporating a novel Z-shaped …