Impact of atomic layer deposition to nanophotonic structures and devices
MR Saleem, R Ali, MB Khan, S Honkanen… - Frontiers in …, 2014 - frontiersin.org
We review the significance of optical thin films by Atomic Layer Deposition (ALD) method to
fabricate nanophotonic devices and structures. ALD is a versatile technique to deposit …
fabricate nanophotonic devices and structures. ALD is a versatile technique to deposit …
Determination of thermo-optic properties of atomic layer deposited thin TiO2 films for athermal resonant waveguide gratings by spectroscopic ellipsometry
MR Saleem, R Ali, S Honkanen… - Micro-Optics 2014, 2014 - spiedigitallibrary.org
We report on variation in the refractive index of amorphous and isotropic TiO 2 thin films
grown by Atomic Layer Deposition (ALD) in nano optical devices. ALD-TiO 2 films of …
grown by Atomic Layer Deposition (ALD) in nano optical devices. ALD-TiO 2 films of …
Partially athermalized waveguide gratings
MR Saleem, S Honkanen, J Turunen - Micro-Optics 2012, 2012 - spiedigitallibrary.org
We investigated high efficiency organic-inorganic hybrid sub-wavelength binary diffraction
gratings as partially athermalized waveguides. The performance of the grating is evaluated …
gratings as partially athermalized waveguides. The performance of the grating is evaluated …
[PDF][PDF] Design, Fabrication and Analysis of Photonic Device Nanostructures
MR Saleem - Citeseer
This thesis provides an insight to resonant waveguide gratings (RWGs) and thermo-optic
coefficients (TOCs) accompanying various organic and inorganic materials. The RWGs …
coefficients (TOCs) accompanying various organic and inorganic materials. The RWGs …