Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …
Epitaxy of High-Quality Single-Crystal Hexagonal Perovskite YAlO3 on GaAs(111)A Using Laminated Atomic Layer Deposition
Single-crystal metastable hexagonal perovskite YAlO3 (H-YAP) films were epitaxially grown
on GaAs (111) A by utilizing sub-nanolaminated (snl) and nanolaminated (nl) atomic layer …
on GaAs (111) A by utilizing sub-nanolaminated (snl) and nanolaminated (nl) atomic layer …