The miniaturization and low power consumption characteristics of RF MEMS (Radio
Frequency Microelectromechanical System) switches provide new possibilities for the …

This paper presents a highly reliable direct-contact electrostatic RF MEMS switch. To
enhance the reliability, the contact structure of the switch is designed into a circular shape …

Reconfigurable pixel antennas are crucial for advancing wireless communication. However,
the increasing number of switches results in exponentially growing complexity in antenna …

Thermal process is an important factor for metal cantilever profile, which may cause stress
change and degeneration of device reliability. In this paper, prestressing-based thermal …

In this study, a tungsten grid has been developed as enhanced encapsulation for
monolithically integrated mm-wave RF-MEMS switches in the Back-End-Of-Line (BEOL) of a …

The rapid growth of flexible display technologies has spurred significant advancements in
thin film technology. These innovations are crucial for developing lightweight, durable, and …