Recent progress on modeling and control of reluctance actuators in precision motion systems

M Pumphrey, M Al Saaideh, N Alatawneh… - Precision …, 2024 - Elsevier
Reluctance actuators (RA) are a type of electromagnetic actuator that offers high forces for
short-range motions. The RA takes advantage of the electromagnetic reluctance force …

Output-feedback control of electromagnetic actuated micropositioning system with uncertain nonlinearities and unknown gap variation

M Al Saaideh, AM Boker… - 2022 IEEE 61st …, 2022 - ieeexplore.ieee.org
This paper investigates the output feedback tracking control of the motion system driven by
an electromagnetic actuator with uncertain nonlinearities and unknown gap variation …

Hysteresis operator-based adaptive Kalman feedforward control for the scanning motion of hybrid reluctance actuators

Y Xu, L Guo, D Pan, H Zhou, J Duan - ISA transactions, 2024 - Elsevier
The hybrid reluctance actuator (HRA) has achieved widespread application in scanning
motion tasks. However, the nonlinear perturbations arising from position-dependent stiffness …

Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method

Q Miao, Y Liu, JB Tan - Frontiers in Energy Research, 2022 - frontiersin.org
The performance of the actuator is becoming increasingly important in the ultra-precision
stage. However, the traditional Lorentz motors with given mechanical parameters cannot …

Output Feedback With Feedforward Robust Control for Motion Systems Driven by Nonlinear Position-Dependent Actuators

M Al Saaideh, AM Boker… - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
This paper introduces a control approach for a motion system driven by a class of actuators
with multiple nonlinearities. The proposed approach presents a combination of a …

On Electromagnetic Variable Air-Gap Reluctance Actuator Motion System: Characterization, Modeling, and Feedforward Control

M Al Saaideh, M Pumphrey… - IEEE/ASME …, 2024 - ieeexplore.ieee.org
Reluctance actuators are being explored as a promising alternative to Lorentz actuators for
driving advanced precision motion systems like lithography machine wafer scanners …

Modeling and compensation of a hollow XY stage based on hybrid reluctance actuators

W Li, W Yu, Z Dai, H Huang, W Chen - Sensors and Actuators A: Physical, 2024 - Elsevier
In the field of beam pointing and optoelectronic imaging, there is a growing demand for
control mechanisms that offer large stroke, and high bandwidth. These are precisely the …

High-Performance Flux Tracking Controller for Reluctance Actuator

Y Liu, Q Miao, Y Dong - Applied Sciences, 2023 - mdpi.com
To meet the ever-increasing demand for next-generation lithography machines, the actuator
plays an important role in the achievement of high acceleration of the wafer stage. However …

Design and Control of a Reluctance-Based Micropositioning Stage for Scanning Motion Applications

M Al Saaideh, N Alatawneh… - 2023 IEEE/RSJ …, 2023 - ieeexplore.ieee.org
This paper presents a design and characterization of a micropositioning stage driven by a
reluctance actuator. The stage is constructed with a C-core reluctance actuator and four …

Flux Estimation and Control Based On High-Gain Observer for Variable Reluctance Actuator Using the Measured Current Only

M Al Saaideh, N Alatawneh… - 2024 American …, 2024 - ieeexplore.ieee.org
Measuring magnetic flux plays a crucial role in developing a linearized controller for a
variable reluctance actuator. However, the method used for measuring magnetic flux may …