Reluctance actuators (RA) are a type of electromagnetic actuator that offers high forces for
short-range motions. The RA takes advantage of the electromagnetic reluctance force …

This paper investigates the output feedback tracking control of the motion system driven by
an electromagnetic actuator with uncertain nonlinearities and unknown gap variation …

The hybrid reluctance actuator (HRA) has achieved widespread application in scanning
motion tasks. However, the nonlinear perturbations arising from position-dependent stiffness …

The performance of the actuator is becoming increasingly important in the ultra-precision
stage. However, the traditional Lorentz motors with given mechanical parameters cannot …

This paper introduces a control approach for a motion system driven by a class of actuators
with multiple nonlinearities. The proposed approach presents a combination of a …

Reluctance actuators are being explored as a promising alternative to Lorentz actuators for
driving advanced precision motion systems like lithography machine wafer scanners …

In the field of beam pointing and optoelectronic imaging, there is a growing demand for
control mechanisms that offer large stroke, and high bandwidth. These are precisely the …

To meet the ever-increasing demand for next-generation lithography machines, the actuator
plays an important role in the achievement of high acceleration of the wafer stage. However …

This paper presents a design and characterization of a micropositioning stage driven by a
reluctance actuator. The stage is constructed with a C-core reluctance actuator and four …

Measuring magnetic flux plays a crucial role in developing a linearized controller for a
variable reluctance actuator. However, the method used for measuring magnetic flux may …