Self-organized nanopatterning of silicon surfaces by ion beam sputtering

J Munoz-Garcia, L Vazquez, M Castro, R Gago… - Materials Science and …, 2014 - Elsevier
Abstract In recent years Ion Beam Sputtering (IBS) has revealed itself as a powerful
technique to induce surface nanopatterns with a large number of potential applications …

Surface nanopatterning by ion beam irradiation: compositional effects

L Vázquez, A Redondo-Cubero, K Lorenz… - Journal of Physics …, 2022 - iopscience.iop.org
Surface nanopatterning induced by ion beam irradiation (IBI) has emerged as an effective
nanostructuring technique since it induces patterns on large areas of a wide variety of …

[HTML][HTML] A perspective on nanoscale pattern formation at surfaces by ion-beam irradiation

R Cuerno, JS Kim - Journal of Applied Physics, 2020 - pubs.aip.org
The formation of periodic patterns on the surfaces of many solid materials undergoing ion-
beam irradiation has long been known. The advent of high resolution characterization …

Transient to steady-state morphology evolution of carbon surfaces under ion bombardment: Monte Carlo simulations

H Tran, HB Chew - Acta Materialia, 2024 - Elsevier
Molecular dynamics (MD) simulations have established the sputtering yields of carbon
under the low-energy bombardment of noble gas ions. Here, we upscale these MD results to …

A surface layer of altered composition can play a key role in nanoscale pattern formation induced by ion bombardment

RM Bradley, PD Shipman - Applied surface science, 2012 - Elsevier
We review and augment our recent work which demonstrates that a surface layer of altered
composition can have a crucial effect on pattern formation induced by ion bombardment of a …

Stress-induced patterns in ion-irradiated silicon: model based on anisotropic plastic flow

SA Norris - Physical Review B—Condensed Matter and Materials …, 2012 - APS
We present a model for the effect of stress on thin amorphous films that develop atop ion-
irradiated silicon, based on the mechanism of ion-induced anisotropic plastic flow. Using …

Crater function approach to ion-induced nanoscale pattern formation: Craters for flat surfaces are insufficient

MP Harrison, RM Bradley - Physical Review B, 2014 - APS
In the crater function approach to the erosion of a solid surface by a broad ion beam, the
average crater produced by the impact of an ion is used to compute the constant coefficients …

Effect of dispersion on the nanoscale patterns produced by ion sputtering

KM Loew, RM Bradley - Physical Review E, 2019 - APS
Our simulations show that dispersion can have a crucial effect on the patterns produced by
oblique-incidence ion sputtering. It can lead to the formation of raised and depressed …

Ion beam nanopatterning of III-V semiconductors: consistency of experimental and simulation trends within a chemistry-driven theory

O El-Atwani, SA Norris, K Ludwig, S Gonderman… - Scientific reports, 2015 - nature.com
Several proposed mechanisms and theoretical models exist concerning nanostructure
evolution on III-V semiconductors (particularly GaSb) via ion beam irradiation. However …

Nanoscale patterns produced by ion erosion of a solid with codeposition of impurities: The crucial effect of compound formation

RM Bradley - Physical Review B—Condensed Matter and Materials …, 2013 - APS
We advance a theory of ripple formation on the surface of an initially elemental material that
is subjected to concurrent oblique-incidence impurity deposition and normal-incidence ion …