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This paper presents a review of electrothermal micro-actuators and applications.
Electrothermal micro-actuators have been a significant research interest over the last two …

Micromachining and micro-electromechanical system (MEMS) technologies can be used to
produce complex structures, devices and systems on the scale of micrometers. Initially …

The development of a SU-8-based microgripper that can operate in physiological ionic
solutions is presented. The electrothermally activated polymer gripper consists of two" hot …

This paper describes electrothermal microactuators that generate rectilinear displacements
and forces by leveraging deformations caused by localized thermal stresses. In one …

An analytical model that can accurately predict the performance of a polysilicon thermal
flexure actuator has been developed. This model is based on an electrothermal analysis of …

Micromachining technology opens up many new opportunities for optical and optoelectronic
systems. It offers unprecedented capabilities in extending the functionality of optical devices …

Electro-thermal (ET) actuators have been developed to complement the capabilities of
electrostatic actuators. The thermal actuators presented here can be arrayed to generate …

Heat engines provide most of our mechanical power and are essential for transportation on
the macroscopic scale. However, although significant progress has been made in the …

Thermomechanical microactuators possess a number of desirable attributes including ease
of fabrication and large force and displacement capabilities relative to other types of …