The miniaturization of electro-mechanical devices, and the resulting need for micro-power
generation (milliwatts to watts) with low weight, long life devices, has lead to the recent …

The development of polymer micromachining technologies that complement traditional
silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) …

Three-dimensional (3D) photonic crystals (PCs) are crystalline materials where the refractive
index is periodically modulated on a length scale comparable to the light wavelength of …

Since its introduction in the nineties, the negative resist SU‐8 has been increasingly used in
micro‐and nanotechnologies. SU‐8 has made the fabrication of high‐aspect ratio structures …

SU-8 is an epoxy-based, negative-tone photoresist that has been extensively utilized to
fabricate myriads of devices including biomedical devices in the recent years. This paper …

Microelectromechanical systems (MEMS) are evolving into highly integrated technologies
for a variety of application areas. Add the biological dimension to the mix and a host of new …

Micro/nano-electroforming has received considerable interest from various industry sectors
as an advanced micro-manufacturing technique that offers high dimensional precision and …

In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with
piezoresistive readout combined with the advances in molecular recognition techniques …

SU-8 has been widely used in a variety of applications for creating structures in micro-scale
as well as sub-micron scales for more than 15 years. One of the most common structures …

This paper demonstrates the versatile application potential of SU8 photoepoxy for
micromechanical components. Its outstanding aspect ratio and attainable film thicknesses …