This paper presents a short review of the microwave acoustics area, where exciting material
innovations and performance advancements have been made in the past decade. The ever …

The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

Bulk acoustic wave (BAW) filters have been extensively used in consumer products for
mobile communication systems due to their high performance and standard complementary …

This work reports on the first demonstration of the frequency tuning and intrinsic polarization
switching of film bulk acoustic resonators (FBARs), based on sputtered AlScN piezoelectric …

Ferroelectrics have great potential in the field of nonvolatile memory due to programmable
polarization states by external electric field in nonvolatile manner. However, complementary …

Scandium-doped aluminum nitride (AlScN) has generated great research interest owing to
its unique properties. The wurtzite-structure AlScN is compatible with the complementary …

Thickness scaling of ferroelectricity in Al1− x Sc x N is a determining factor for its potential
application in neuromorphic computing and memory devices. In this letter, ultrathin (10 nm) …

Epitaxial Sc x Al 1− x N thin films of∼ 100 nm thickness grown on metal polar GaN
substrates are found to exhibit significantly enhanced relative dielectric permittivity (ε r) …

Recently, owing to the asymmetric structures, the 2D Janus piezoelectric materials have
attracted much attention. However, the piezoelectric property of Janus materials related to a …

This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in
sputtered scandium aluminum nitride (ScAlN). This paper identifies challenges of frequency …