Microelectromechanical systems (MEMS) resonators have allowed the development of
magnetic field sensors with potential applications such as biomedicine, automotive industry …

After more than ten years of researches by different groups, this work summarizes the
various frequency-modulated techniques for microelectromechanical system (MEMS) based …

The impetus of this research is to numerically investigate a measurement method for out-of-
plane motion detection in an encapsulated electrostatic MEMS gyroscope. This method is …

This letter presents a micromachined silicon Lorentz force magnetometer, which consists of
a flexural beam resonator coupled to current-carrying silicon beams via a microleverage …

The work presents a microelectromechanical system (MEMS) based magnetometer,
targeting compass applications performance, which measures magnetic fields along an in …

In this paper, an electromagnetic induction based resonant MEMS magnetometer used for
out-of-plane magnetic field sensing is demonstrated. The main structure (named as 4S …

This paper presents a 3-axis Lorentz force magnetometer based on an encapsulated
micromechanical silicon resonator having three orthogonal vibration modes, each …

We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring
low field values. The magnetometer consists of a silicon micro-beam sandwiched between …

This article presents several design techniques to fabricate micro-electro-mechanical
systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) …

This work presents a single-structure 3-axis Lorentz force magnetometer (LFM) based on an
AlN-on-Si MEMS resonator. The operation of the proposed LFM relies on the flexible …