AlN MEMS filters with extremely high bandwidth widening capability

A Gao, K Liu, J Liang, T Wu - Microsystems & Nanoengineering, 2020 - nature.com
This paper presents radio frequency (RF) microelectromechanical system (MEMS) filters
with extremely high bandwidth widening capability. The proposed filtering topologies …

Epitaxial aluminum scandium nitride super high frequency acoustic resonators

M Park, Z Hao, R Dargis, A Clark… - Journal of …, 2020 - ieeexplore.ieee.org
This paper demonstrates super high frequency (SHF) Lamb and surface acoustic wave
resonators based on single-crystal orientation Aluminum Scandium Nitride (AlScN) thin films …

The multi-mode resonance in AlN Lamb wave resonators

J Zou, CM Lin, A Gao, AP Pisano - Journal of …, 2018 - ieeexplore.ieee.org
The characteristics of the multi-mode resonance behavior of AlN Lamb wave resonators
(LWRs) are theoretically and experimentally investigated for the first time in this paper …

An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators

TH Hsu, SS Tung, YM Huang, GL Wu… - Journal of …, 2023 - iopscience.iop.org
This work investigates a co-design approach for fundamental symmetric Lamb wave (S 0)
resonators (LWR) and film bulk acoustic wave resonators (FBAR) in a commercial 8-inch …

Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes

T Luo, Q Xu, Z Wen, Y Qu, J Zhou, B Lin… - IEEE Electron …, 2023 - ieeexplore.ieee.org
Spurious modes (SMs) suppression and electromechanical coupling coefficient ()
improvement in Lamb wave resonators (LWRs) have always been the research hotspot. In …

S-Band Micromechanical Resonant Impedance Transformers Based on Aluminum Nitride FBARs

YM Huang, CY Chang, TH Hsu, Y Ho… - IEEE Transactions …, 2023 - ieeexplore.ieee.org
This work presents an intensive study of passive voltage amplification offered by one-port
microelectromechanical systems (MEMS) piezoelectric resonators used as matching …

Twist piezoelectricity: giant electromechanical coupling in magic-angle twisted bilayer LiNbO3

H Yao, P Zheng, S Zhang, C Hu, X Fang… - Nature …, 2024 - nature.com
Twisted a pair of stacked two-dimensional materials exhibit many exotic electronic and
photonic properties, leading to the emergence of flat-band superconductivity, moiré …

An a1 mode resonator at 12 ghz using 160nm lithium niobate suspended thin film

S Link, R Lu, Y Yang, AE Hassanien… - 2021 IEEE International …, 2021 - ieeexplore.ieee.org
This paper demonstrates a 160 nm thick first-and third-order antisymmetric mode Lithium
Niobate resonator. The presented device maintains feature sizes on the order of …

[PDF][PDF] A review of Lamé and Lamb mode crystal resonators for timing applications and prospects of Lamé and Lamb mode PiezoMEMS resonators for filtering …

CS Lam, A Gao, CM Lin, J Zou - Proc. 7th Int. Symp. Acoustic …, 2018 - skyworksinc.com
The first resonator based on Extensional Mode anchored at nodal points using the GT-cut of
quartz crystal appeared in the 1940s. Though AT-and SC-cut Thickness-Shear (ThS) Mode …

Transverse spurious mode compensation for AlN Lamb wave resonators

J Zou, J Liu, G Tang - IEEE Access, 2019 - ieeexplore.ieee.org
Lamb wave modes with type I dispersion characteristics exhibit strong affinity toward multi
transverse modes behavior above resonance frequency (fr) in the AlN Lamb wave …