Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)

A Anders - Journal of Applied Physics, 2017 - pubs.aip.org
High Power Impulse Magnetron Sputtering (HiPIMS) is a coating technology that combines
magnetron sputtering with pulsed power concepts. By applying power in pulses of high …

Physics and technology of magnetron sputtering discharges

JT Gudmundsson - Plasma Sources Science and Technology, 2020 - iopscience.iop.org
Magnetron sputtering deposition has become the most widely used technique for deposition
of both metallic and compound thin films and is utilized in numerous industrial applications …

[HTML][HTML] Glows, arcs, ohmic discharges: An electrode-centered review on discharge modes and the transitions between them

A Anders - Applied Physics Reviews, 2024 - pubs.aip.org
Ever since they have been studied, gas discharges have been classified by their visual
appearance as well as by their current and voltage levels. Glow and arc discharges are the …

[HTML][HTML] Physics of E× B discharges relevant to plasma propulsion and similar technologies

ID Kaganovich, A Smolyakov, Y Raitses, E Ahedo… - Physics of …, 2020 - pubs.aip.org
This paper provides perspectives on recent progress in understanding the physics of
devices in which the external magnetic field is applied perpendicular to the discharge …

Foundations of physical vapor deposition with plasma assistance

JT Gudmundsson, A Anders… - … Sources Science and …, 2022 - iopscience.iop.org
Physical vapor deposition (PVD) refers to the removal of atoms from a solid or a liquid by
physical means, followed by deposition of those atoms on a nearby surface to form a thin …

Introduction to magnetron sputtering

JT Gudmundsson, D Lundin - High power impulse magnetron sputtering, 2020 - Elsevier
Plasma-based physical vapor deposition (PVD) methods have found widespread use in
various industrial applications. In plasma-based PVD processes, the deposition species are …

[HTML][HTML] High growth rate magnetron sputter epitaxy of GaN using a solid Ga target

K Pingen, AM Hinz, P Sandström, N Wolff, L Kienle… - Vacuum, 2024 - Elsevier
Magnetron sputter epitaxy (MSE) is a promising processing route for group-III nitride
semiconductors, with the potential to enable high-quality and low cost GaN growth for …

Particle-balance models for pulsed sputtering magnetrons

C Huo, D Lundin, JT Gudmundsson… - Journal of Physics D …, 2017 - iopscience.iop.org
The time-dependent plasma discharge ionization region model (IRM) has been under
continuous development during the past decade and used in several studies of the …

Rotating spokes, ionization instability, and electron vortices in partially magnetized E× B plasmas

JP Boeuf, M Takahashi - Physical review letters, 2020 - APS
Regions of enhanced light emission rotating in the azimuthal direction are present in various
E× B plasma devices. A kinetic model reveals that these “rotating spokes” are due to …

Spokes in high power impulse magnetron sputtering plasmas

A Hecimovic, A Von Keudell - Journal of Physics D: Applied …, 2018 - iopscience.iop.org
High-power impulse magnetron sputtering is a deposition technique where a metal
magnetron target is sputtered in a high-density plasma to synthesise thin layers with …