针对谐振传感器Q 值低导致输出信号噪声水平高, 传感分辨率低的问题, 提出FeGa 薄膜与AT
切型石英晶片复合的高品质因数谐振磁场传感器. AT 切型石英晶片受到交流电压激励以厚度剪 …

Magnetoelastic micro-electromechanical systems (MEMS) are integral elements of sensors,
actuators, and other devices utilizing magnetostriction for their functionality. Their sensitivity …

A RF field sensor in which a magnetostrictive film is deposited on one or more electrodes of
one or more quartz resonator (s) in which an electric field of the RF field is detected along …

Recently, Delta-E effect magnetic field sensors based on exchange-biased magnetic
multilayers have shown the potential of detecting low-frequency and small-amplitude …

This study presents the effects of bottom electrode designs on the operation of laterally
vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs …

Miniaturized piezoelectric/magnetostrictive resonators have been proven to be effective
magnetometers with the E effect. Here, we reported the magnetic field angle-sensitive …

In recent investigations of magnetoelectric sensors based on microelectromechanical
cantilevers made of TiN/AlN/Ni, a complex eigenfrequency behavior arising from the …

In this work, magnetoelectric MEMS sensors based on a TiN/AlN/Ni laminate are
investigated for the first time in regards of the anisotropic elastic properties when using hard …

This paper demonstrates a novel resonant magnetic sensor that utilizes a concentrator to
obtain a large magnetic-field gradient. A silicon-cantilevered resonator, with a 10-µm …

Origami allows 3D structural motions to be built from thin and flat sheets. The current open-
loop manipulation of creases only offers predictive control in structural environments without …