High-performance devices usually have curved surfaces, requiring high accuracy of shape
and low surface roughness. It is a challenge to achieve high accuracies for form and position …

Magnetorheological polishing is a potential process for the low-damage manufacture of
optics, semiconductors, and related devices. However, due to magnetic materials' size and …

Abstract A functional Fe 3 O 4/SiO 2 core–shell abrasive was synthesized via hydrolysis of
tetraethyl orthosilicate. A silica shell was successfully coated on a Fe 3 O 4 core, resulting in …

Chemical reactions will occur on sapphire surface in the magneto-rheological polishing
(MRP) process with Fe 3 O 4/SiO 2 core–shell abrasives, resulting in a chemical products …

Toxic and polluted ingredients are normally employed in the chemical mechanical polishing
of sapphire wafers, which results in widespread environmental pollution. Thus, developing a …

To improve the polishing quality and optimize the polishing process of sapphire hemisphere,
the ultrasound assisted magneto-rheological polishing (UAMP) of sapphire hemisphere …

High-quality and high-efficiency processing of gallium nitride (GaN) crystals is urgently
required for optoelectronic communications and other major industries. This study proposes …

Abstract The Ti-6Al-4V alloy is an important material used in many high-end devices, such
as medical, aerospace, petrochemical, and sports equipment. Thus, the feasibility of …

Electromagnetic composite rheological polishing (EMRP) is a new ultra-precision machining
technology that combines electro-rheological polishing (ERP) and magneto-rheological …

In magnetorheological polishing (MRP), the abrasive grains are confined in a semi-fixed
mode by the chain strings formed by the magnetorheological particles to achieve the …