Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng… - Journal of Micromechanics …, 2021 - iopscience.iop.org
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

Y Gao, M Chen, Z Wu, L Yao, Z Tong, S Zhang… - Microsystems & …, 2023 - nature.com
Transit-time ultrasonic flowmeters (TTUFs) are among the most widely used devices for flow
measurements. However, traditional TTUFs are usually based on a bulk piezoelectric …

Eye-tracking monitoring based on PMUT arrays

S Sun, J Wang, M Zhang, Y Yuan… - Journal of …, 2021 - ieeexplore.ieee.org
As common and natural activity of human beings, eye movement has been regarded as an
indicator of human physiological and psychological health; eye movement tracking has …

Multifunctional high-density ultrasonic microsensor for ranging and 2D imaging

T Ruan, Q Wang, Z Hu, Q Xu, Y Xi, L Li, B Yang… - Applied Physics …, 2023 - pubs.aip.org
Ultrasound has been implemented as a powerful tool for noninvasive imaging and non-
contact ranging. However, the size and single-function of traditional ultrasonic probes have …

Piezoelectric Micromachined Ultrasonic Transducers under Forced Vibration: Improving Acoustic Range and Reducing Blind Area

H Lyu, X Xiu, S Zhang, H Yang… - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
This article delves into the enhancement of dynamic performance in piezoelectric
micromachined ultrasonic transducers (PMUTs) under forced vibration in pulse-wave mode …