Quality control of micro–nano structured and freeform surfaces is becoming increasingly
important, which leads to challenging requirements in the measurement and …

White light scanning interferometry is a very important technique for nanometrology. In this
paper, a robust white light interference signal processing algorithm using random phase …

With increasing miniaturization and rising demands on the manufacturing accuracy of
surface structures in the micro-and nanometer range, the requirements for measurement …

White-light scanning interferometry (WLSI) is an important measurement technique that has
been widely used in three-dimensional profile reconstruction. Because of the effects of …

In this investigation, we propose a dual low coherence scanning interferometer as the novel
concept to measure large height steps on the topographic surface of a specimen and the …

We investigate data compensation and all fiber probe for an interferometric measurement of
high-frequency dynamic displacement. In this measurement, the reference light is modulated …

Imaging the complex dynamics of micro-vibrations plays a fundamental role in the
investigation of microelectromechanical systems (MEMS). However, it remains a challenge …

Because conventional laser Doppler vibrometry or Doppler optical coherence tomography
require mechanical scanning probes that cannot simultaneously measure the wide-range …

A method for determining the spatially resolved acoustic field inside a water-filled
microchannel is presented. The acoustic field, both amplitude and phase, is determined by …

This study combined a previously developed optical system with two additional key
elements: a supercontinuum light source characterized by high output power and an …