There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having front and back …

The characteristics of the multi-mode resonance behavior of AlN Lamb wave resonators
(LWRs) are theoretically and experimentally investigated for the first time in this paper …

A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration
mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which …

This article presents a comprehensive study of the performance of Sezawa surface acoustic
wave (SAW) devices in SweGaN QuanFINE ultrathin GaN/SiC platform, reaching …

This work presents a novel ultra-high frequency Lamb mode Aluminum nitride piezoelectric
resonator with enhanced quality factors (Q). With slots introduced in the vicinity of the tether …

Lamb wave modes with type I dispersion characteristics exhibit strong affinity toward multi
transverse modes behavior above resonance frequency (fr) in the AlN Lamb wave …

Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate
having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, a …

The development of MEMS acoustic resonators meets the increasing demand for in situ
detection with a higher performance and smaller size. In this paper, a lithium niobate film …

Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having front and back …

Filter devices and methods are disclosed. A filter device includes a substrate having a
surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the …