As high-precision measuring instruments have developed, interferometers have been widely
applied in the measurement of lengths and of the shape of surfaces, with nanometer …

Optical interferometry is a powerful tool for measuring and characterizing areal surface
topography in precision manufacturing. A variety of instruments based on optical …

We describe a method that combines phase-shifting and coherence-peak-sensing
techniques to permit measurements with the height resolution of phase-shifting …

White-light scanning interferometry is increasingly used for precision profile metrology of
engineering surfaces, but its current applications are limited primarily to opaque surfaces …

Results of the application of wavelet transform for signal processing in white-light
interferometry are reported. The mother wavelet frequency is chosen to be the light-source …

Combining phase and coherence information for improved precision in white-light
interference microscopy requires a robust strategy for dealing with the inconsistencies …

An interference fringe modulation skewing effect in white-light vertical scanning
interferometry that can produce a batwings artifact in a step height measurement is …

Height-dependent variations in fringe visibility related to optical coherence in an interference
microscope provide a powerful, non-contact sensing mechanism for 3D measurement and …

Quality control of micro–nano structured and freeform surfaces is becoming increasingly
important, which leads to challenging requirements in the measurement and …

Optical techniques which were developed for ex situ characterization of static
displacements, motions, vibrations and internal strain of micromechanical devices and M (O) …