Piezoelectric MEMS based acoustic sensors: A review

WR Ali, M Prasad - Sensors and Actuators A: Physical, 2020 - Elsevier
This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …

Evaluation of the Tauc method for optical absorption edge determination: ZnO thin films as a model system

BD Viezbicke, S Patel, BE Davis… - physica status solidi …, 2015 - Wiley Online Library
One of the most frequently used methods for characterizing thin films is UV–Vis absorption.
The near‐edge region can be fitted to a simple expression in which the intercept gives the …

Assessing Tauc plot slope quantification: ZnO thin films as a model system

JB Coulter, DP Birnie III - physica status solidi (b), 2018 - Wiley Online Library
One of the most frequently used methods for characterizing thin films is UV–Vis absorption.
The near‐edge region can be fitted to a simple expression where the intercept gives the …

Enhancement of ZnO nanorods properties using modified chemical bath deposition method: effect of precursor concentration

AF Abdulrahman, SM Ahmed, NM Ahmed… - Crystals, 2020 - mdpi.com
In this study, the effects of different precursor concentrations on the growth and
characteristics properties of the zinc oxide (ZnO) nanorods (NRs) synthesized by using …

Heterojunction of SnO2 nanosheet/arrayed ZnO nanorods for humidity sensing

MH Mamat, AS Ismail, N Parimon, N Vasimalai… - Materials Chemistry and …, 2022 - Elsevier
For the first time, a rutile phased tin oxide (SnO 2) nanosheet was assembled onto a zinc
oxide (ZnO) nanorod array to form SnO 2 nanosheet/ZnO nanorod array heterostructure …

Improvement of thermoelectric properties of flexible Bi2Te3 thin films in bent states during sputtering deposition and post-thermal annealing

O Norimasa, T Chiba, M Hase, T Komori… - Journal of Alloys and …, 2022 - Elsevier
High-quality thermoelectric thin films formed on flexible substrates are important for the
development of flexible thermoelectric generators as power supplies for wireless sensors …

Sonicated sol–gel preparation of nanoparticulate ZnO thin films with various deposition speeds: The highly preferred c-axis (0 0 2) orientation enhances the final …

MF Malek, MH Mamat, Z Khusaimi, MZ Sahdan… - Journal of Alloys and …, 2014 - Elsevier
Zinc oxide (ZnO) thin films have been deposited onto glass substrates at various deposition
speeds by a sonicated sol–gel dip-coating technique. This work studies the effects of …

Synthesis of ZnO sol–gel thin-films CMOS-Compatible

NB Moussa, M Lajnef, N Jebari, C Villebasse, F Bayle… - RSC …, 2021 - pubs.rsc.org
Zinc oxide (ZnO) is a II–VI group semiconductor with a wide direct bandgap and is an
important material for various fields of industry and high-technological applications. The …

Thermal annealing-induced formation of ZnO nanoparticles: Minimum strain and stress ameliorate preferred c-axis orientation and crystal-growth properties

MF Malek, MH Mamat, MZ Musa, Z Khusaimi… - Journal of Alloys and …, 2014 - Elsevier
Nanocrystalline zinc oxide (ZnO) thin films have been deposited on glass substrates using a
sonicated sol–gel dip-coating technique at various thermal annealing (T a) temperatures …

Influence of Al doping on structural and optical properties of Mg–Al co-doped ZnO thin films prepared by sol–gel method

D Fang, K Lin, T Xue, C Cui, X Chen, P Yao… - Journal of alloys and …, 2014 - Elsevier
Abstract Mg–Al co-doped ZnO (AMZO) thin films were successfully deposited onto quartz
glass substrates by sol–gel spin coating method. The structure, surface morphology …