In this paper, we experimentally investigate the effect of the shape of nanoparticles in
acetone-based Al 2 O 3 nanofluids on the thermal resistance of a flat-plate heat pipe …

A semiconductor heating device is the core component of the apparatus used for testing
semiconductor dies. It is important to heat semiconductor dies at a uniform temperature. The …

The present study aims to numerically analyze the surface temperature uniformity of the
multi-zone/single-zone ceramic heaters because the temperature uniformity becomes …

Electrostatic chuck (ESC) is used to transport and fix semiconductors during semiconductor
processing effectively. In addition, the wafer is heated and cooled by the ESC to control its …

The probe chuck is an inspection device assessing the thermal durability of semiconductor
wafers in various temperature environments before shipping. It is most important to ensure …

The results of the spreading thermal resistance, heat transfer and flow characteristics of the
vapor chamber embedded with plate fin are investigated. The experiments are performed …

The temperature uniformity of heater plates (HPs) should be sustained due to critical
dimension uniformity and robust operation in high temperature processing of 300 mm …

This study investigates packaging effects on the sensing performance of resistance
temperature detectors (RTDs) on an AlN substrate of a wafer heater. The study utilizes a …

This study proposed a method using Low-melting-point alloy (LMPA) to seal Micro heat
pipes (MHPs), which were made of Si substrates and glass covers. Corresponding MHP …

In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes
are repeated. During these processes, the inside of the processing chamber is exposed to …