Research on CMUTs Design with Different Cell Arrangements
X Cao, Y Yu, X Liu, J Ma, H Zhang… - Recent Patents on …, 2024 - ingentaconnect.com
Background: Capacitive micromachined ultrasonic transducers (CMUTs) is a promising
component of mechanical-electrical-acoustical conversion, which shows valuable …
component of mechanical-electrical-acoustical conversion, which shows valuable …