State-of-the-art materials used in MEMS micromirror arrays for photonic applications
S Liu, P Kästner, R Donatiello, A Shrivastava… - Photonics, 2024 - mdpi.com
This work provides an overview on micromirror arrays based on different material systems
such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D …
such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D …
[引用][C] State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications. Photonics 2024, 11, 253
S Liu, P Kästner, R Donatiello, A Shrivastava… - 2024