The piezoresistive effect of SiC for MEMS sensors at high temperatures: A review

HP Phan, DV Dao, K Nakamura… - Journal of …, 2015 - ieeexplore.ieee.org
Silicon carbide (SiC) is one of the most promising materials for applications in harsh
environments thanks to its excellent electrical, mechanical, and chemical properties. The …

One-dimensional SiC nanostructures: Designed growth, properties, and applications

S Chen, W Li, X Li, W Yang - Progress in Materials Science, 2019 - Elsevier
Silicon carbide (SiC) is recognized as one of the shining stars of third generation
semiconductors, because of its preeminent characteristics, for instance, outstanding …

Laser-driven hierarchical “gas-needles” for programmable and high-precision proximity transfer printing of microchips

F Chen, M Gai, N Sun, Z Xu, L Liu, H Yu, J Bian… - Science …, 2023 - science.org
Micro–transfer printing (μTP) techniques are essential for advanced electronics. However,
current contact/noncontact μTP techniques fail to simultaneously achieve high selectivity …

[图书][B] Nanosensors: physical, chemical, and biological

VK Khanna - 2021 - books.google.com
Nanosensors are innovative devices that exploit the unique properties exhibited by matter at
the nanoscale. A growing and exciting field, nanosensors have recently spurred …

[PDF][PDF] Review of micromachined optical accelerometers: from mg to sub-μg

Q Lu, Y Wang, X Wang, Y Yao, X Wang… - Opto-Electronic …, 2021 - researching.cn
Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of
accelerometer which combines the merits of optical measurement and Micro-Electro …

A review of micromachined thermal accelerometers

R Mukherjee, J Basu, P Mandal… - … of Micromechanics and …, 2017 - iopscience.iop.org
A thermal convection based micro-electromechanical accelerometer is a relatively new kind
of acceleration sensor that does not require a solid proof mass, yielding unique benefits like …

MEMS-based piezoresistive and capacitive microphones: A review on materials and methods

A Kumar, A Varghese, D Kalra, A Raunak… - Materials Science in …, 2024 - Elsevier
Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …

Giant piezoresistive effect by optoelectronic coupling in a heterojunction

T Nguyen, T Dinh, ARM Foisal, HP Phan… - Nature …, 2019 - nature.com
Enhancing the piezoresistive effect is crucial for improving the sensitivity of mechanical
sensors. Herein, we report that the piezoresistive effect in a semiconductor heterojunction …

Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring

T Dinh, HP Phan, TK Nguyen, A Qamar… - Journal of Physics D …, 2017 - iopscience.iop.org
In this paper, we report on a low-cost, environment-friendly and wearable thermal flow
sensor, which can be manufactured in-house using pencil graphite as a sensing hot film and …

Fundamental piezoresistive coefficients of p-type single crystalline 3C-SiC

HP Phan, D Viet Dao, P Tanner, L Wang… - Applied Physics …, 2014 - pubs.aip.org
The orientation dependence of the piezoresistive effect of p-type single crystalline 3C-SiC
thin film grown on a (100) Si wafer was characterized. The longitudinal, transverse gauge …