Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

This article reports on the state-of-the-art of the development of aluminum nitride (AlN) thin-
film microelectromechanical systems (MEMS) with particular emphasis on acoustic devices …

This work makes an overview of the progress made during the last decade with regard to a
novel class of piezoelectric microwave devices employing acoustic Lamb waves in …

In its most basic form an oscillator consists of a resonator driven on resonance, through
feedback, to create a periodic signal sustained by a static energy source. The generation of …

We describe and demonstrate a new oscillator topology, the parametric feedback oscillator
(PFO). The PFO paradigm is applicable to a wide variety of nanoscale devices and opens …

The explosive development of wireless and mobile communication systems has
continuously driven rapid technology innovation in component performance and system …

This paper reports on the first demonstration of a reconfigurable complementary-metal-oxide-
semiconductor (CMOS) oscillator based on microelectromechanical system (MEMS) …

This paper presents a transverse mode suppression theory and its experimental verification
through aluminum nitride Lamb wave resonators (LWRs) operating at 142 MHz. An effective …