Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

Here we present a critical review related to the important acoustic device technologies being
used for gas sensing applications. Acoustic devices find wide applications in chemical and …

In the past several decades, acoustic wave biosensors, as an emerging kind of biosensors,
have been developed and widely used for the detection of mass, viscosity, conductivity and …

Biosensors play important roles in different applications such as medical diagnostics,
environmental monitoring, food safety, and the study of biomolecular interactions. Highly …

Because of unique water properties, humidity affects many living organisms, including
humans and materials. Humidity control is important in various fields, from production …

The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used
as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device …

ZnO thin film based surface and bulk acoustic wave devices are reviewed in this paper. The
films were initially produced using a standard RF sputtering technique. However in order to …

Because of unique water properties, humidity affects materials and many living organisms,
including humans. Humidity control is important in various fields, from production …

This paper presented a high-performance pressure sensor based on a film bulk acoustic
resonator (FBAR). The support film of the FBAR chip was made of silicon nitride and the part …

Acoustic devices have been widely used as smart chemical and biochemical sensors since
they are sensitive to mechanical, chemical, optical or electrical perturbations on their …