MEMS piezoelectric sensor for self-powered devices: A review

M Sawane, M Prasad - Materials Science in Semiconductor Processing, 2023 - Elsevier
The bulkiness of traditional batteries, as well as frequent charging and electronic detritus
caused by the replacement of old batteries, hinder the ability of low-powered electronic …

Piezoelectric MEMS based acoustic sensors: A review

WR Ali, M Prasad - Sensors and Actuators A: Physical, 2020 - Elsevier
This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …

A review of MEMS capacitive microphones

SA Zawawi, AA Hamzah, BY Majlis, F Mohd-Yasin - Micromachines, 2020 - mdpi.com
This review collates around 100 papers that developed micro-electro-mechanical system
(MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive …

Design approaches of MEMS microphones for enhanced performance

MA Shah, IA Shah, DG Lee, S Hur - Journal of sensors, 2019 - Wiley Online Library
This paper reports a review about microelectromechanical system (MEMS) microphones.
The focus of this review is to identify the issues in MEMS microphone designs and …

Control synthesis of low aspect ratio Zn1-xAgxO nanorods using low temperature solution route: evidence of Ag concentration dependent shape transition

S Mukherjee, S Pramanik, S Das… - Materials Research …, 2022 - Elsevier
Understanding the effect of doping concentration on the various properties of metal-doped
ZnO nanoparticles (NPs) near the shape transition point (sphere to the rod) is essentially …

Textile-Based Sound Sensors (TSS): New Opportunities for Sound Monitoring in Smart Buildings

A Giglio, K Neuwerk, M Haupt, GM Conti, I Paoletti - Textiles, 2022 - mdpi.com
Persistent poor acoustic conditions can imbalance humans' psychophysical capabilities. A
good acoustic project starts with either correct measurements of the existing acoustic …

Design and modelling of a bidirectional front-end for resonating sensors based on pseudo floating gate amplifier

L Marchetti, Y Berg, M Azadmehr - Electronics, 2017 - mdpi.com
In this paper, we characterize and model a bidirectional front-end based on pseudo-floating
gate amplifier (PFGA) for actuation and read-out of resonating sensors. The basic idea …

Design, modeling and simulation of square diaphragm based, piezoelectric (AlN) MEMS acoustic sensor for high SPL measurements

DS Arya, S Kumar, M Prasad, P Singh… - The Physics of …, 2019 - Springer
This paper reports the aluminum nitride (AlN) based piezoelectric MEMS acoustic sensor for
aeroacoustic applications. The acoustic sensor reported, is square diaphragm based, which …

Electret microphone for photoacoustic spectrometer and a simple power meter

VN Rai, SN Thakur - Photoacoustic and Photothermal Spectroscopy, 2023 - Elsevier
Electret microphone is a device that is used as a detector to record the indirect
photoacoustic (PA) signal. Most of the PA spectrometers contain a sensitive electret …

[PDF][PDF] Modeling of microelectromechanical systems diaphragm based acoustic sensor

V Hegde, N Chaulagain, HM Ravikumar… - International Journal of …, 2018 - academia.edu
Acoustic sensors are extensively used in recent days not only for sensing and condition
monitoring applications but also for small scale energy harvesting applications to power …