Ultra-thick electroplated CoPt magnets for MEMS

Y Wang, J Ewing, DP Arnold - Journal of …, 2019 - ieeexplore.ieee.org
This paper reports the fabrication and magnetic characterization of very thick (50+ μm) and
high-performing (coercivity up to 850 kA/m; energy products up to 75 kJ/m 3) electroplated …

Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS sensors and actuators

X Sun, Q Yuan, D Fang, H Zhang - Sensors and Actuators A: Physical, 2012 - Elsevier
In this paper, electroplated CoNiMnP permanent magnet arrays have been designed,
fabricated and studied. The arrays contain cylinder magnets with various radius as well as …

Thick multilayered micromachined permanent magnets with preserved magnetic properties

Y Li, J Kim, M Kim, A Armutlulu… - Journal of …, 2016 - ieeexplore.ieee.org
This paper presents microfabricated permanent magnets possessing a multilayer structure
that preserves the high magnetic energy density of thinner magnetic films, while …

A single-input, single-output electromagnetically-transduced microresonator array

AB Sabater, AG Hunkler… - Journal of Micromechanics …, 2014 - iopscience.iop.org
Resonant microsystems have found broad applicability in environmental and inertial
sensing, signal filtering and timing applications. Despite this breadth in utility, a common …

-Thick High-Energy-Density Electroplated CoPt Permanent Magnets

Y Wang, BY Jimenez, DP Arnold - 2020 IEEE 33rd International …, 2020 - ieeexplore.ieee.org
This paper reports electroplated CoPt permanent magnets samples yielding thicknesses up
to 100\mum, deposition rates up to 35\mum/h, coercivities up to 1000 kA/m (1.25 T) …

[PDF][PDF] Retaining high areal in-plane magnetic energy density over large magnetic thickness: a permanent magnetic microlamination approach based on sequential …

Y Li, J Kim, M Kim, A Armutlulu… - Proc. Solid …, 2014 - transducer-research-foundation.org
Many magnetic MEMS devices such as magnetic-based microscale energy harvesters rely
on the availability of microscale permanent magnets capable of generating significant …

A novel MEMS electromagnetic energy harvester with series coils

ZL Li, M Di Han, HX Zhang - 2013 Transducers & Eurosensors …, 2013 - ieeexplore.ieee.org
A novel MEMS electromagnetic energy harvester with series coils was designed, fabricated
and tested. The magnetic properties of permanent magnets were analyzed by MAXWELL …

Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS applications

X Sun, Q Yuan, D Fang, H Zhang - 2011 16th International …, 2011 - ieeexplore.ieee.org
In this paper, electroplated CoNiMnP permanent magnet arrays with different geometries
and thickness have been designed, fabricated and tested. The arrays contain cylinder …

Design and fabrication of flexible parylene-based inductors with electroplated NiFe magnetic core for wireless power transmission system

X Sun, Y Zheng, Z Li, M Yu, Q Yuan… - 2012 7th IEEE …, 2012 - ieeexplore.ieee.org
Integrated flexible parylene-based MEMS inductors were successfully designed, fabricated
and analyzed. By elctrodeposition technique, Ni 80 Fe 20 Permalloy with high permeability …

[PDF][PDF] Electrodeposition of CoNiMnP Thick Films for Micromachined Magnetic Device Applications

P Barbu, MM Codescu, M Iordoc, V Marinescu… - Revista de …, 2018 - researchgate.net
CoNiMnP permanent magnetic alloys were electrodeposited on copper and brass
substrates from a bath containing 26 g/L CoCl2· 6H2O, 24 g/L NiCl2· 6H2O, 3.6 g/L MnSO4 …