Review of molecular layer deposition process and application to area selective deposition via graphitization
GH Baek, HL Yang, GB Park… - Japanese Journal of …, 2023 - iopscience.iop.org
As the patterning technology used for manufacturing highly integrated devices continues to
develop in the current semiconductor market, sophisticated technology nodes of 5 nm or …
develop in the current semiconductor market, sophisticated technology nodes of 5 nm or …