Pressure sensors play a vital role in aerospace, automotive, medical, and consumer
electronics. Although microelectromechanical system (MEMS)-based pressure sensors have …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

A study of GaN for high temperature (HT, up to 500° C) digital circuits was conducted. A HT-
robust GaN-on-Si technology based on enhancement-mode p-GaN-gate AlGaN/GaN high …

This paper reports on the high temperature (HT) robustness of enhancement-mode (E-
mode) p-GaN-gated Al-GaN/GaN high electron mobility transistors (HEMTs), with an …

In-line inspection (ILI) technology is a crucial tool for maintaining pipeline integrity. However,
it faces considerable challenges such as adaptability in identifying various types of faults. In …

This letter reports temperature compensated single crystal silicon (SCS) bulk-mode
capacitive microelectromechanical system (MEMS) resonators with high temperature …

In this paper, the design, modeling and characterization of width-extensional (WE) mode
piezoelectric microelectromechanical systems (MEMS) resonators are presented. The …

In this article, the design, implementation, and characterization of a micro-oven-controlled
dual-mode piezoelectric microelectromechanical system (MEMS) resonator are presented …

In this letter, we report a performance enhancement approach for MEMS thermopile Pirani
sensors through in-situ integration of nanoforests. The nanoforests not only increase the …

This letter presents a high-performance piezoelectric ring resonator with ultra-low relative
frequency split designed for mode-matching gyroscope. Design optimization for supporting …