[HTML][HTML] A review on piezoelectric energy harvesting: materials, methods, and circuits
Piezoelectric microelectromechanical systems (PiezoMEMS) are attractive for developing
next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly …
next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly …
AlN piezoelectric thin films for energy harvesting and acoustic devices
Aluminum nitride (AlN) thin films are widely investigated due to their unique physical
properties and applications in energy harvesting devices, ultrasonic transducers …
properties and applications in energy harvesting devices, ultrasonic transducers …
A nanopower synchronous charge extractor IC for low-voltage piezoelectric energy harvesting with residual charge inversion
The paper presents a power converter for piezoelectric energy harvesting implementing a
modified version of a synchronous electrical charge extraction with quiescent current as low …
modified version of a synchronous electrical charge extraction with quiescent current as low …
Design and performance of ScAlN/AlN trapezoidal cantilever-based MEMS piezoelectric energy harvesters
In this work, we report a method to enlarge the trapezoidal cantilever-based harvester power
by using the high-performance Sc 0.2 Al 0.8 N/aluminum nitride (AlN) composite film and …
by using the high-performance Sc 0.2 Al 0.8 N/aluminum nitride (AlN) composite film and …
A study on the acoustic energy harvesting with Helmholtz resonator and piezoelectric cantilevers
S Noh, H Lee, B Choi - International Journal of Precision Engineering and …, 2013 - Springer
Some kinds of thermofluid instruments are using Helmholtz resonators for absorbing noises
radiated from them. Since the resonance frequency of a Helmholtz resonator depends on …
radiated from them. Since the resonance frequency of a Helmholtz resonator depends on …
Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor
This paper reports a piezoelectric zinc oxide (ZnO) based acoustic sensor for high sound
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …
Optimization of thick photoresist for uniform thickness in RF MEMS applications
Abstract Micro-electromechanical systems (MEMS)-based devices comprise suspended
structures. A sacrificial layer is required to realize these structures. Usually, metal and …
structures. A sacrificial layer is required to realize these structures. Usually, metal and …
Fabrication, simulation and characterisation of MEMS piezoelectric vibration energy harvester for low frequency
A MEMS vibration energy harvester using an Aluminium Nitride (AlN) piezoelectric layer was
designed, fabricated and characterized. The harvester was fabricated on an SOI wafer with a …
designed, fabricated and characterized. The harvester was fabricated on an SOI wafer with a …
Improving voltage output with PZT beam array for MEMS-based vibration energy harvester: theory and experiment
Z Wen, L Deng, X Zhao, Z Shang, C Yuan… - Microsystem …, 2015 - Springer
Piezoelectric vibration energy harvesters as an autonomous power source for various types
of sensors, actuators and MEMS devices have attracted increasing attention in recent years …
of sensors, actuators and MEMS devices have attracted increasing attention in recent years …
The fabrication of vibration energy harvester arrays based on AlN piezoelectric film
Z Shang, D Li, Z Wen, X Zhao - Journal of Semiconductors, 2013 - iopscience.iop.org
The fabrication and measurement results of the vibration energy harvester arrays based on
the piezoelectric aluminum nitride (AlN) film are presented. The structure design and …
the piezoelectric aluminum nitride (AlN) film are presented. The structure design and …