A high speed focus control microelectromechanical systems (MEMS) mirror with a step
response time of 100 μsec and small-displacement bandwidth of 25 kHz is reported for a 3 …

We report on the fabrication and characterization of an optimized comb-drive actuator
design for strain-dependent transport measurements on suspended graphene. We fabricate …

This paper proposes an electrothermally-actuated circular pyramidal kirigami microscanner
with a millimeter-range low-power lens drive for endoscopic biomedical applications. A …

(57) ABSTRACT A micro-electro-mechanical systems (MEMS) autofocus actuator having a
Support member for Supporting a lens ele ment, the Support member including a stationary …

We describe a microelectromechanical systems-based actuator for three-dimensional (3D)
positioning of a polymer microlens implemented using silicon-on-glass technology. The …

A tunable photonic nanojet achieved using a core–shell microcylinder with nematic liquid
crystal is reported. The core–shell microcylinder can be obtained by the infiltration of liquid …

A monolithic photonic chip with multifunctional light emission/detection and electro-optic
modulation capabilities in the near-infrared range is proposed and realized on an InP-based …

Comb structures are widely used in micro-electromechanical systems as basic components
of electrostatic actuators, capacitive sensors, resonators and energy harvesters. Typically …

This paper reports a micro-XZ-stage with large quasi-static displacement in both in-plane
and out-of-plane directions, achieved by monolithic integration of large-vertical …

A new tunable plasmonic biosensor is proposed by embedding liquid crystals in the slit
region of a corrugated plasmonic nanoslit array. The absorption spectrum of the structure …