Micromachined accelerometers with sub-µg/√ Hz noise floor: a review
This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …
Design, modelling and system level simulations of DRIE-based MEMS differential capacitive accelerometer
The paper presents design, analytical modelling and system level simulations of a highly
sensitive single-axis in-plane Micro-Electro-Mechanical-Systems (MEMS) differential …
sensitive single-axis in-plane Micro-Electro-Mechanical-Systems (MEMS) differential …
Microfabrication process-driven design, FEM analysis and system modeling of 3-DoF drive mode and 2-DoF sense mode thermally stable non-resonant MEMS …
This paper presents microfabrication process-driven design of a multi-degree of freedom
(multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope …
(multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope …
Design and analysis of serpentine based MEMS accelerometer
K Uttara - AIP Conference Proceedings, 2018 - pubs.aip.org
MEMS accelerometers using serpentine beams is analyzed and investigated for vibration
sensing applications. A design and analysis in terms of its operating frequency and stress …
sensing applications. A design and analysis in terms of its operating frequency and stress …
Simulation analysis and fabrication of a silicon carbide-based piezoresistive accelerometer
This paper proposes a Micro Electro Mechanical Systems piezoresistive accelerometer
based on a whole SiC substrate. Compared with Si-based sensors, SiC-based sensors have …
based on a whole SiC substrate. Compared with Si-based sensors, SiC-based sensors have …
Tri-adaptive method for improving the resolution of MEMS digital sensors
The micro-electromechanical systems (MEMS) digital sensors have been widely used in
various fields, eg, industrial application, navigation and positioning, etc. In order to make full …
various fields, eg, industrial application, navigation and positioning, etc. In order to make full …
Design and analysis of mode-matched decoupled mass MEMS gyroscope with improved thermal stability
This paper presents an efficient design approach for microelectromechanical systems
(MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator …
(MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator …
Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine
Y Zhai, T Xu, G Xu, H Wang, X Cao… - 2023 22nd International …, 2023 - ieeexplore.ieee.org
This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and
packaging scheme were designed, an efficient signal processing circuit was built, and the …
packaging scheme were designed, an efficient signal processing circuit was built, and the …
Design and simulations of high-sensitivity multi-directional inertial sensor
This paper proposed the high sensitive linear and rotational based differential capacitive
inertial sensor. The designed sensor consists of a proof of mass, which resides in an air …
inertial sensor. The designed sensor consists of a proof of mass, which resides in an air …
A MEMS All‐SiC Accelerometer and its Application in Vibration Test of Aero‐Engine†
Y Zhai, T Xu, G Xu, H Wang, X Cao… - IEEJ Transactions on …, 2024 - Wiley Online Library
This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and
packaging scheme were designed, an efficient signal processing circuit was built, and the …
packaging scheme were designed, an efficient signal processing circuit was built, and the …