Recent advances in focused ion beam nanofabrication for nanostructures and devices: Fundamentals and applications

P Li, S Chen, H Dai, Z Yang, Z Chen, Y Wang, Y Chen… - Nanoscale, 2021 - pubs.rsc.org
The past few decades have witnessed growing research interest in developing powerful
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

J Munoz-Garcia, L Vazquez, M Castro, R Gago… - Materials Science and …, 2014 - Elsevier
Abstract In recent years Ion Beam Sputtering (IBS) has revealed itself as a powerful
technique to induce surface nanopatterns with a large number of potential applications …

Developments in micro/nanoscale fabrication by focused ion beams

CS Kim, SH Ahn, DY Jang - Vacuum, 2012 - Elsevier
Focused ion beam (FIB) technology has become increasingly attractive for the fabrication of
micro/nano structures for the purpose of the demands in industry and research. In this paper …

Achieving micron-scale plasticity and theoretical strength in Silicon

M Chen, L Pethö, AS Sologubenko, H Ma… - Nature …, 2020 - nature.com
As the backbone material of the information age, silicon is extensively used as a functional
semiconductor and structural material in microelectronics and microsystems. At ambient …

Substrate-dependent fractal growth and wettability of N+ ion implanted V2O5 thin films

B Priya, P Jasrotia, I Sulania, R Kumar… - Applied Surface …, 2023 - Elsevier
Wettability of active material surface affects the electrolyte and electrode-material interaction
in electrochemical applications. An increase in the V 2 O 5 electrode's wetting behaviour …

Fracture of Silicon: Influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting

CM Lauener, L Petho, M Chen, Y Xiao, J Michler… - Materials & Design, 2018 - Elsevier
The pillar indentation splitting test is a novel technique for assessing the fracture behavior of
materials using micro-scale pillar samples. One typical limitation of this technique is the …

Oxygen Vacancy Creation, Drift, and Aggregation in TiO2‐Based Resistive Switches at Low Temperature and Voltage

J Kwon, AA Sharma, JA Bain, YN Picard… - Advanced Functional …, 2015 - Wiley Online Library
Transmission electron microscopy with in situ biasing has been performed on TiN/single‐
crystal rutile TiO2/Pt resistive switching structures. Three elementary processes essential for …

Morphology, structure, and chemistry of nanoclusters in a mechanically alloyed nanostructured ferritic steel

MC Brandes, L Kovarik, MK Miller, MJ Mills - Journal of Materials Science, 2012 - Springer
Nanostructured ferritic steels have excellent elevated temperature strengths, creep
resistances, and radiation tolerances due to the presence of a high density of Ti–Y–O …

Transformation from cluster to nano-precipitate in microalloyed ferritic steel

J Wang, M Weyland, I Bikmukhametov, MK Miller… - Scripta Materialia, 2019 - Elsevier
Carbide precipitates are pivotal for strengthening steels and improving their resistance to
hydrogen-embrittlement. Combining aberration-corrected high-resolution transmission …

Energy filtering transmission electron microscopy and atomistic simulations of tribo-induced hybridization change of nanocrystalline diamond coating

MIDB Bouchet, C Matta, B Vacher, T Le-Mogne… - Carbon, 2015 - Elsevier
The tribofilm formed on nanocrystalline diamond coating during ultralow friction in presence
of water and glycerol lubrication has been studied experimentally by energy filtering …