Measuring the magnetic configuration at complex buried layers and interfaces is an
important task, which requires especially a non-destructive probing technique. X-ray …

The influence of growth parameters on the properties of AlN films fabricated by plasma-
enhanced atomic layer deposition using trimethylaluminum and ammonia precursors was …

Nanolayer stacks are technologically very relevant for current and future applications in
many fields of research. A nondestructive characterization of such systems is often …

Impurities in aluminum nitride films prepared by plasma enhanced atomic layer deposition
using NH 3-, N 2/H 2-and N 2-based plasmas are investigated by combining time-of-flight …

The continuous downscaling of the process size for semiconductor devices pushes the
junction depths and consequentially the implantation depths to the top few nanometers of …

X-ray resonant magnetic reflectivity (XRMR) is a powerful method to determine the optical,
structural and magnetic depth profiles of a variety of thin film systems. Here, we investigate …

This study proposes a new approach to periodic multilayer mirrors (PMMs) characterizations
based on measured X-ray reflectivity (XRR) data. Here, XRR data are used to reconstruct …

Yb2O3 thin films were grown onto Si (100) and glass substrates by atomic layer deposition
using Yb (thd) 3 and ozone precursors. Self saturating growth appeared when the growth …

The influence of Poisson noise on the accuracy of x-ray reflectivity analysis is studied with
an aluminium oxide (AlO) layer on silicon. A null hypothesis which argues that other than the …

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