Field-effect transistor (FET)-based biosensors have a wide range of applications, and a bio-
FET odorant sensor, based on insect (Sf21) cells expressing insect odorant receptors (ORs) …

Circularly polarized light in the vacuum ultraviolet (VUV) region is important for probing the
structural and electronic properties of matter. Moreover, a circularly polarized VUV coherent …

The rapid development of microfluidic technology has increased the demand for the
integration of driving circuits in the microfluidic devices. We have proposed a novel on-chip …

A novel on-chip integrated high-voltage (HV) generator is realized by our unique MEMS post-
processing method with the standard CMOS process on a silicon-on-insulator (SOI) …

Integrated devices incorporating MEMS (microelectromechanical systems) with IC
(integrated circuit) components have been becoming increasingly important in the era of IoT …

A common MEMS micro-bridge structure-based process was developed on 200 mm
standard CMOS Al back end of line. Thick amorphous-Si (alpha-Si) film was developed and …

P-channel metal–oxide–semiconductor field-effect transistors (PMOSFETs) with the< 110>
or< 100> channel direction have been successfully fabricated on circular silicon-on-insulator …

In this paper, we address issues and solutions for micro-electro-mechanical-systems
(MEMS) powering through semiconductor devices towards one-chip MEMS, especially …

PVD-TiN metal gate PMOSFETs and CMOS ring oscillators have successfully been
fabricated on circular diaphragms using the developed Minimal Fab CMOS-MEMS …

In this paper, we report on the impact of sample preparation methods on the adhesion
reproducibility of thin films, considering future applications of supercritical fluid deposition …