(*) Notice: Subject to any disclaimer, the term of this “A real-time equipment monitoring and
fault detection system'. patent is extended or adjusted under 35 Guo et al., Semiconductor …

The invention relates to a method, system and computer program useful for producing a
product, such as a microelectronic device, for example in an assembly line, where the …

Generic interface adapter builder softWare generates an US'PATENT DOCUMENTS
interface adapter to tie tools into a centralized manufacturing 3,205,485 A 9/1965 Noltingk …

US6913938B2 - Feedback control of plasma-enhanced chemical vapor deposition processes
- Google Patents US6913938B2 - Feedback control of plasma-enhanced chemical vapor …

A system/method for interactively monitoring and adjusting product output from a module
that includes two or more preparation tools. The output is a result of the coordinated effort of …

3,229, 198 3,767,900 3,920,965 4,000.458 4,207,520 4,209,744 4,302,721 4,368,510
4,609,870 4,616,308 4,663,703 4,698,766 4,717,596 4,750,141 4,755,753 4,757,259 4,796 …

ABSTRACT A method, apparatus and medium of conditioning a pla narizing Surface
includes installing a wafer to be polished in a chemical mechanical polishing (CMP) …

US PATENT DOCUMENTS 5,719,796 A 2, 1998 Chen 5,735,055 A 4/1998 Hochbein et al.
4,901,218 A 2f1990 Cornwell 5,740,429 A 4/1998 Wang et al. 4,938,600 A 7, 1990 Into …

The present invention provides a novel distributed factory system framework including a
novel factory automation lifecycle (200) having lifecycle activities for SW developing and …

A method for monitoring performance of an advanced process control system for at least one
process output includes calculating a variance of a prediction error for a processing …