Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices

D Berman, J Krim - Progress in Surface Science, 2013 - Elsevier
Micro-and Nano-Electro-Mechanical Systems (MEMS and NEMS) represent existing
(MEMS) and emerging (NEMS) technologies based on microfabrication of micron to …

Design optimization and analysis of selected thermal devices using self-adaptive Jaya algorithm

RV Rao, KC More - Energy Conversion and Management, 2017 - Elsevier
The present study explores the use of an improved Jaya algorithm called self-adaptive Jaya
algorithm for optimal design of selected thermal devices viz; heat pipe, cooling tower …

Review of the properties of gold material for MEMS membrane applications

JG Noel - IET Circuits, Devices & Systems, 2016 - Wiley Online Library
Materials selection for radio frequency (RF) microelectromechanical (MEM) switches
application is important for overall design and fabrication of devices. The processing …

Detection of nonlocal calibration parameters and range interaction for dynamics of FGM porous nanobeams under electro-mechanical loads

P Jankowski - Facta Universitatis, Series: Mechanical …, 2022 - casopisi.junis.ni.ac.rs
The present investigation examines the range of effect of nonlocal parameters on dynamic
behavior of a smart beam-like nanostructure modeled as sandwich functionally graded …

Highly efficient passive thermal micro-actuator

H Steiner, F Keplinger, J Schalko… - Journal of …, 2015 - ieeexplore.ieee.org
A passive thermal micro-actuator with large area specific work and large displacement,
fabricated of electroplated nickel on a silicon substrate is presented. The actuation relies on …

A thermosensitive electromechanical model for detecting biological particles

M SoltanRezaee, M Bodaghi, A Farrokhabadi - Scientific reports, 2019 - nature.com
Miniature electromechanical systems form a class of bioMEMS that can provide appropriate
sensitivity. In this research, a thermo-electro-mechanical model is presented to detect …

Thermal actuators featuring large displacements for passive temperature sensing

H Steiner, W Hortschitz, M Stifter, F Keplinger… - Microsystem …, 2014 - Springer
The thermal actuator presented in this paper consists of two symmetrically V-shaped beam
stacks, where each stack consists of six beams in parallel. The stacks are coupled facing …

An Approach to Near Zero Power Bi-Stable Driving With a Simple Pulse Signal for RF MEMS Switch

R He, L Wang, Z Sun, J Zhao - Journal of …, 2024 - ieeexplore.ieee.org
This paper reports a novel bi-stable structure for a radio frequency micro-electro-mechanical
system (RF MEMS) switch. The structure is activated by an in-plane electrostatic actuator …

Compact thermally actuated latching MEMS switch with large contact force

D Dellaert, J Doutreloigne - Electronics Letters, 2015 - Wiley Online Library
A novel latching microelectromechanical system (MEMS) switch is reported, which uses a
compact configuration of thermal actuators. In the proposed latching mechanism, the …

Microgalvanic nickel pulse plating process for the fabrication of thermal microactuators

WEG Hansal, H Steiner, R Mann, M Halmdienst… - Microsystem …, 2014 - Springer
Nickel is a common material in micro fabrication because of its fatigue resistance and its
mechanical properties. It is used for instance for thermal actuators, micro-grippers, or RF …