The bulkiness of traditional batteries, as well as frequent charging and electronic detritus
caused by the replacement of old batteries, hinder the ability of low-powered electronic …

This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …

To fabricate a high‐performance and ultrasensitive triboelectric nanogenerator (TENG),
choice of a combination of different materials of triboelectric series is one of the prime …

This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …

This paper reports a piezoelectric zinc oxide (ZnO) based acoustic sensor for high sound
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …

This work describes the development of an acoustic sensor based on piezoelectric ZnO thin
film to be utilized for aero-acoustic measurements. The design of the device was carried out …

This paper reports the development of an acoustic sensor structure with a square-shaped
diaphragm with side length 1750 μm. The fabricated structure has been annealed at …

This paper describes a technique for fabrication of AlN based structure for MEMS acoustic
sensor and similar applications. The AlN films of 2.1 μm thickness are grown on silicon …

This paper reports a novel method for fabrication of diaphragm along with microtunnels for
various applications. Micromasking, grass formation, uniformity over the process wafer …

This paper reports a new technique for fabrication of diaphragm and microchannel in a
single step for the development of a piezoelectric MEMS acoustic sensor. It describes the …