MEMS piezoelectric sensor for self-powered devices: A review
M Sawane, M Prasad - Materials Science in Semiconductor Processing, 2023 - Elsevier
The bulkiness of traditional batteries, as well as frequent charging and electronic detritus
caused by the replacement of old batteries, hinder the ability of low-powered electronic …
caused by the replacement of old batteries, hinder the ability of low-powered electronic …
Piezoelectric MEMS based acoustic sensors: A review
This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …
Surface potential tuned single active material comprised triboelectric nanogenerator for a high performance voice recognition sensor
To fabricate a high‐performance and ultrasensitive triboelectric nanogenerator (TENG),
choice of a combination of different materials of triboelectric series is one of the prime …
choice of a combination of different materials of triboelectric series is one of the prime …
[HTML][HTML] Recent development and futuristic applications of MEMS based piezoelectric microphones
This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …
microphones along with the fabrication processes involved, application domains, and …
Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor
This paper reports a piezoelectric zinc oxide (ZnO) based acoustic sensor for high sound
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …
Piezoelectric based MEMS acoustic sensor for wide frequency applications
This work describes the development of an acoustic sensor based on piezoelectric ZnO thin
film to be utilized for aero-acoustic measurements. The design of the device was carried out …
film to be utilized for aero-acoustic measurements. The design of the device was carried out …
Fabrication and annealing temperature optimization for a piezoelectric ZnO based MEMS acoustic sensor
This paper reports the development of an acoustic sensor structure with a square-shaped
diaphragm with side length 1750 μm. The fabricated structure has been annealed at …
diaphragm with side length 1750 μm. The fabricated structure has been annealed at …
Deposition and process development of AlN for MEMS acoustic sensor
This paper describes a technique for fabrication of AlN based structure for MEMS acoustic
sensor and similar applications. The AlN films of 2.1 μm thickness are grown on silicon …
sensor and similar applications. The AlN films of 2.1 μm thickness are grown on silicon …
Development of diaphragm and microtunnel structures for MEMS piezoelectric sensors
This paper reports a novel method for fabrication of diaphragm along with microtunnels for
various applications. Micromasking, grass formation, uniformity over the process wafer …
various applications. Micromasking, grass formation, uniformity over the process wafer …
Fabrication of microchannel and diaphragm for a MEMS acoustic sensor using wet etching technique
WR Ali, M Prasad - Microelectronic Engineering, 2022 - Elsevier
This paper reports a new technique for fabrication of diaphragm and microchannel in a
single step for the development of a piezoelectric MEMS acoustic sensor. It describes the …
single step for the development of a piezoelectric MEMS acoustic sensor. It describes the …